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Volumn 593, Issue , 2000, Pages 465-470

Tensile properties of amorphous diamond films

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS FILMS; ELASTIC MODULI; FAILURE (MECHANICAL); FRACTURE TOUGHNESS; FRICTION; MECHANICAL VARIABLES MEASUREMENT; MICROELECTROMECHANICAL DEVICES; MICROSENSORS; STIFFNESS; SUBSTRATES; TENSILE STRENGTH; TENSILE TESTING;

EID: 0033716220     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper
Times cited : (2)

References (13)
  • 3
    • 0033319639 scopus 로고    scopus 로고
    • MEMS Reliability for Critical and Space Applications
    • LaVan, D. A. and T.E. Buchheit in MEMS Reliability for Critical and Space Applications, (SPIE Proc. 3880, 1999), pp. 40-44.
    • (1999) SPIE Proc. , vol.3880 , pp. 40-44
    • LaVan, D.A.1    Buchheit, T.E.2
  • 4
    • 33751136674 scopus 로고    scopus 로고
    • Materials Science of Microelectromechanical Systems (MEMS) II, submitted
    • LaVan, D.A. and T.E. Buchheit in Materials Science of Microelectromechanical Systems (MEMS) II, (MRS Proc. 1999), submitted.
    • (1999) MRS Proc.
    • LaVan, D.A.1    Buchheit, T.E.2
  • 11
    • 33751127079 scopus 로고    scopus 로고
    • private communication
    • Knapp, J., private communication, 1999.
    • (1999)
    • Knapp, J.1
  • 12
    • 0032292269 scopus 로고    scopus 로고
    • Microelectromechanical Structures for Materials Research
    • Sharpe, W.N., Jr., S. Brown, G.C. Johnson, W. Knauss in Microelectromechanical Structures for Materials Research, (MRS Proc. 518, 1998), pp. 57-65.
    • (1998) MRS Proc. , vol.518 , pp. 57-65
    • Sharpe Jr., W.N.1    Brown, S.2    Johnson, G.C.3    Knauss, W.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.