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Volumn 593, Issue , 2000, Pages 465-470
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Tensile properties of amorphous diamond films
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Author keywords
[No Author keywords available]
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Indexed keywords
AMORPHOUS FILMS;
ELASTIC MODULI;
FAILURE (MECHANICAL);
FRACTURE TOUGHNESS;
FRICTION;
MECHANICAL VARIABLES MEASUREMENT;
MICROELECTROMECHANICAL DEVICES;
MICROSENSORS;
STIFFNESS;
SUBSTRATES;
TENSILE STRENGTH;
TENSILE TESTING;
FRICTIONAL LOSSES;
NANOINDENTER;
TENSILE FORCE;
TENSILE LOAD;
UNIAXIAL TENSION;
DIAMOND FILMS;
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EID: 0033716220
PISSN: 02729172
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (2)
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References (13)
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