Friction measurement in MEMS using a new test structure

Materials Research Society Symposium - Proceedings

Volumn 605, Issue , 2000, Pages 129-134

  Crozier, B T ^a   De Boer, M P ^b   Redmond, J M ^b   Bahr, D F ^a   Michalske, T A ^b  

^a WASHINGTON STATE UNIVERSITY   (United States)

^b SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CANTILEVER BEAMS; COATING TECHNIQUES; DRYING; ELECTROSTATICS; FRICTION; INTERFEROMETRY; MECHANICAL VARIABLES MEASUREMENT; MONOLAYERS; POLYSILICON; SILANES; WEAR OF MATERIALS;

FRICTION MEASUREMENT; PERFLUORINATED DECYLTRICHLOROSILANE; SUPER CRITICAL CARBON DIOXIDE DRYING;

MICROELECTROMECHANICAL DEVICES;

EID: 0034506754     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (15)

1. M.P deBoer, J.A. Knapp, T.M. Mayer, T.A. Michalske. Proc. SPIE/EOS Conf. On Microsystems Metrology and Inspection, Munich, June 15, 1999.
2. C.H. Mastrangelo and C.H. Hsu. Proc. IEEE Solid-State Sensor & Actuator Workshop, Hilton Head, SC, USA, pp. 208. 1992.
3. J.N. Israelachvili et al. J. Adhesion Sci. Technol., 8:11, pp. 1231-1249. 1994.
4. M.P deBoer, J.M. Redmond, T.A. Michalske. SPIE Proc. 3512. Santa Clara, CA. Sept. 1998.
5. U. Srinivasan, et al. IEEE Hilton Head '98, Hilton Head Island, SC, USA, 1998. pp.156-161.
6. S.L. Miller, J.J. Sniegowski, G. LaVigne, and P.J. McWhorter. Proc. SPIE Smart Electronics and MEMS, 2722, pp. 197-204. 1996.
7. M. Mehregany and S.D. Senturia. IEEE Trans. On Electron Devices, 39:5. 1992.
8. K. Deng, et al. J. Electrochem. Soc.,142:4. April 1995.
9. D.M. Tanner, J.A. Walraven, L. W. Irwin, et.al. IEEE Int. Reliability Phys. Symp. March 21-25 1999. pp. 189-197
10. M.G. Lim et al. Proc. IEEE MEMS Workshop, Napa Valley, CA, USA, Feb. 1990, pp. 8288.
11. R.W. Carpick, M. Salmeron. Chem. Rev. 97:4, pp. 1163-1194. 1997.
12. J.J. Sniegowski and M.S. Rodgers. Tech.Dig. IEEE Int. Electron Devices Meeting, IEDM, Washington, D.C.Dec. 7-10, 1997, pp. 903-906.
13. C.W. Dyck, J.H. Smith, S.L. Miller, E.M Russick, C.L.J. Adkins. SPIE Micromachining and Microfabrication, October 1996.
14. E.S. Hung, and S.D. Senturia, IEEE Hilton Head '98, Hilton Head Island, SC, USA, June 1998, pp. 83-86.
15. B.T. Crozier, to be published