Effect of deposition conditions on the chemical bonding in sputtered carbon nitride films

Diamond and Related Materials

Volumn 5, Issue 2, 1996, Pages 163-168

  Axen N ^a   Botton, G A ^a   Somekh, R E ^a   Hutchings, I M ^a  

^a UNIVERSITY OF CAMBRIDGE   (United Kingdom)

Author keywords

Carbon nitride; Electron energy loss spectroscopy; Sputter deposition; Thin films

Indexed keywords

EID: 0004805602     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/0925-9635(95)00343-6     Document Type: Article

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