Microstructural characterization of carbon films and CNx films produced by N+ implantation

Journal of Physics Condensed Matter

Volumn 9, Issue 8, 1997, Pages 1743-1761

  Laidani, N ^a,b   Miotello, A ^b   Glisenti, A ^c,f   Bottani, C ^d   Perriere, J ^e  

^a Centro Materiali e Biofisica Medica   (Italy)

^b UNIVERSITY OF TRENTO   (Italy)

^c IBM ALMADEN RESEARCH CENTER   (United States)

^d POLITECNICO DI MILANO   (Italy)

^e CNRS   (France)

^f UNIVERSITY OF PADOVA   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000811977     PISSN: 09538984     EISSN: None     Source Type: Journal    
DOI: 10.1088/0953-8984/9/8/007     Document Type: Article

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