Tribological and mechanical properties of carbon nitride thin coating prepared by ion-beam-assisted deposition

Tribology Letters

Volumn 2, Issue 1, 1996, Pages 13-21

  Khurshudov, Andrei ^a   Kato, Koji ^a   Sawada, Daisuke ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

Carbon nitride; Coating life; Hardness; Internal stress; Ion beam assisted deposition

Indexed keywords

EID: 33749564316     PISSN: 10238883     EISSN: None     Source Type: Journal    
DOI: 10.1007/BF00182544     Document Type: Article

References (16)

1. A.Y. Liu and M.L. Cohen, Science 245 (1989) 841.
2. A.Y. Liu and M.L. Cohen, Phys. Rev. B 41 (1990) 10727.
3. T.-An Yen, C.-L. Lin, J.M. Sivertsen and J.H.Judy, IEEE Trans. Magn. 27 (1991) 5163.
4. M.Y. Chen, X. Lin, V.P. Dravid, Y.-W. Chung, M.-S. Wong and W.D. Sproul, Surf. Coatings Technol. 54/55 (1992) 360.
5. M.Y. Chen, X. Lin, V.P. Dravid, Y.-W. Chung, M.-S. Wong and W.D. Sproul, Tribol. Trans. 36 (1993) 491.
6. E.H.A. Dekempeneer, J. Meneve, J. Smeets, S. Kuypers, L. Eersels and R. Jacobs, Surf. Coatings Technol. 68/69 (1994) 621.
7. D. Li, E. Cutiongco, Y.-W. Chung, M.-S. Wong and W.D. Sproul, Surf. Coatings Technol. 68/ 69 (1994) 611.
8. D. Li, Y.-W. Chung, M.-S. Wong and W.D. Sproul, Tribol. Trans. 37 (1994) 479.
9. J.W. Zou, K. Reichelt, K. Schmidt and B. Discher, J. Appl. Phys. 65 (1989) 3914.
10. X. Jiang, J.W. Zou, K. Reichelt and P. Grunberg, J. Appl. Phys. 66 (1989) 4729.
11. D.F. Franceschini, C.A. Acheté and F.L. Freire, Appl. Phys. Lett. 60 (1992) 3229.
12. D. Li, Y.-W. Chung, M.-S. Wong and W.D. Sproul, Tribol. Lett, 1 (1995) 87.
13. D.S. Rickerby and A. Matthews, eds., Advanced Surface Coatings: A Handbook of Surface Engineering (Blackie, New York, 1991).
14. M. Yanagisawa and Y. Motomura, Lubrication Eng. 43 (1987) 52.
15. Properties of Silicon, INSPEC (The Institute of Electrical Engineering, London, 1988).
16. H. Tsai and D.B. Bogy, J. Vac. Sci. Technol. A 5 (1987) 3287.