Imprinting of polymer at low temperature and pressure

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 22, Issue 5, 2004, Pages 2486-2492

  Tan, L ^a   Kong, Y P ^b   Pang, S W ^a   Yee, A F ^a,b  

^a UNIVERSITY OF MICHIGAN   (United States)

^b INSTITUTE OF MATERIALS RESEARCH AND ENGINEERING   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

CHITOSANS; MICROCONTACT PRINTING; NANOIMPRINT LITHOGRAPHY (NIL); SOFT INK-PAD (SIP);

ARRAYS; BIOMATERIALS; ELECTROMAGNETIC WAVE DIFFRACTION; GLASS TRANSITION; GLYCEROL; LITHOGRAPHY; LOW TEMPERATURE EFFECTS; MOLDS; PLASTICIZERS; PRESSURE EFFECTS; REFRACTIVE INDEX; SEMICONDUCTOR DEVICES; TRANSISTORS; ULTRAVIOLET RADIATION;

POLYMERS;

EID: 9744254516     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1800353     Document Type: Article

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