Polymer inking as a micro- and nanopatterning technique

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 21, Issue 6, 2003, Pages 2749-2754

  Bao, L R ^a   Tan, L ^a   Huang, X D ^b   Kong, Y P ^b   Guo, L J ^a   Pang, S W ^a   Yee, A F ^a,b  

^a UNIVERSITY OF MICHIGAN   (United States)

^b INSTITUTE OF MATERIALS RESEARCH AND ENGINEERING   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; ETCHING; INTERFACIAL ENERGY; MOLECULAR WEIGHT; PHOTOLITHOGRAPHY; PRESSURE EFFECTS; SCANNING ELECTRON MICROSCOPY; SELF ASSEMBLY; SURFACE TREATMENT; THERMAL EFFECTS; THIN FILMS;

DEWETTING; NANOIMPRINT LITHOGRAPHY (NIL); NANOPATTERNS; PATTERN TRANSFER; POLYMER INKING;

POLYMETHYL METHACRYLATES;

EID: 0942289232     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1625955     Document Type: Conference Paper

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