Stacked polymer patterns imprinted using a soft inkpad

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 22, Issue 4, 2004, Pages 1873-1878

  Kong, Y P ^a   Tan, L ^b   Pang, S W ^b   Yee, A F ^b  

^a INSTITUTE OF MATERIALS RESEARCH AND ENGINEERING   (Singapore)

^b UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

JET PRINTING; MASKING LAYERS; SOFT INKPADS; STACKED POLYMER PATTERNS;

COATING TECHNIQUES; COATINGS; COMPUTER SIMULATION; FIBER BRAGG GRATINGS; INK; MASKS; MICROELECTRONICS; MOLDS; PHOTOMETERS; PLASMA HEATING; SOLUBILITY; SUBSTRATES; SURFACE TREATMENT; THIN FILMS;

SEMICONDUCTING POLYMERS;

EID: 4344663079     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1756882     Document Type: Conference Paper

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