Radiofrequency sheath fields above a metal-dielectric interface

Journal of Applied Physics

Volumn 96, Issue 9, 2004, Pages 4762-4770

  Barnat, E V ^a   Hebner, G A ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

METAL-DIELECTRIC INTERFACES; RADIOFREQUENCY SHEATH; RYDBERG STATES; STARK SHIFTS;

ARGON; DIELECTRIC MATERIALS; ELECTRODES; FLUORESCENCE; INTERFACES (MATERIALS); SPECTROSCOPIC ANALYSIS; SURFACE PROPERTIES;

ELECTRIC FIELD MEASUREMENT;

EID: 9744221103     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1794901     Document Type: Article

References (45)

1. C. Cardinaud, M.-C. Peignon, and P.-Y. Tessier, Appl. Surf. Sci. 164, 72 (2000).
2. M. Armacost et al., IBM J. Res. Dev. 43, 39 (1999).
3. D. Humbird and D. B. Graves, Plasma Sources Sci. Technol. 11, A191 (2002).
4. S. J. Ullal, T. W. Kim, V. Vahedi, and E. S. Aydil, J. Vac. Sci. Technol. A 21, 589 (2003).
5. M. Schaepkens and G. S. Oehrlein, J. Electrochem. Soc. 148, C211 (2001).
6. R. M. Bradley, J. M. E. Harper, and D. A. Smith, J. Appl. Phys. 60, 4160 (1986).
7. J. Coburn and H. F. Winters, J. Appl. Phys. 50, 3189 (1979).
8. J. A. Leninson, E. S. G. Shaqfeh, M. Balooch, and A. V. Hamza, J. Vac. Sci. Technol. B 18, 172 (2000).
9. S. A. Vitale, H. Chae, and H. H. Sawin, J. Vac. Sci. Technol. A 19, 2197 (2001).
10. G. Carter, Phys. Rev. B 62, 8376 (2000).
11. I. Petrov, P. B. Barna, L. Hultman, and J. E. Greene, J. Vac. Sci. Technol. A 21, S117 (2003).
12. P. A. Miller and M. Riley, J. Appl. Phys. 69, 2909 (1997).
13. J. R. Woodworth, I. C. Abraham, M. E. Riley, P. A. Miller, T. W. Hamilton, B. P. Aragon, and R. J. Shul, J. Vac. Sci. Technol. A 20, 873 (2002).
14. I. C. Abraham, J. R. Woodworth, M. E. Riley, P. A. Miller, T. W. Hamilton, and B. P. Aragon, J. Vac. Sci. Technol. A 20, 1759 (2002).
15. T. Panagopoulos and D. J. Economou, J. Appl. Phys. 87, 3435 (1999).
16. E. A. Edelberg and E. S. Aydil, J. Appl. Phys. 86, 4799 (1999).
17. S.-B. Wang and A. E. Wendt, J. Vac. Sci. Technol. A 19, 2425 (2001).
18. E. V. Barnat and T.-M. Lu, J. Appl. Phys. 92, 2984 (2002).
19. E. V. Barnat and T.-M. Lu, Phys. Rev. E 66, 056401 (2002).
20. R. J. Hoekstra and M. J. Kushner, J. Appl. Phys. 77, 3668 (1995).
21. D. Kim and D. J. Economou, J. Appl. Phys. 94, 3740 (2003).
22. D. Kim and D. J. Economou, J. Appl. Phys. 95, 3311 (2004).
23. J. R. Woodworth, B. P. Aragon, and T. W. Hamilton, Appl. Phys. Lett. 70, 1947 (1997).
24. J. R. Woodworth et al., J. Vac. Sci. Technol. A 21, 147 (2003).
25. T. Kinoshita, M. Hane, and J. P. McVittie, J. Vac. Sci. Technol. B 14, 560 (1996).
26. G. S. Hwang and K. P. Giapis, J. Vac. Sci. Technol. B 15, 70 (1997).
27. R. A. Gottscho, Phys. Rev. A 36, 2233 (1987).
28. D. K. Doughty and J. E. Lawler, Appl. Phys. Lett. 45, 611 (1984).
29. B. L. Prepernau and B. N. Ganguly, Rev. Sci. Instrum. 64, 1414 (1993).
30. K. E. Greenberg and G. A. Hebner, Appl. Phys. Lett. 16, 3282 (1993).
31. G. A. Hebner, K. E. Greenberg, and M. E. Riley, J. Appl. Phys. 76, 4036 (1994).
32. U. Czarnetzki, G. A. Hebner, D. Luggenholscher, H. F. Dobele, and M. E. Riley, IEEE Trans. Plasma Sci. 27, 70 (1999).
33. U. Czarnetzki, D. Luggenholscher, and H. F. Dobele, Phys. Rev. Lett. 81, 4592 (1998).
34. U. Czarnetzki, D. Luggenholscher, and H. F. Dobele, Plasma Sources Sci. Technol. 8, 230 (1999).
35. U. Czarnetzki, D. Luggenholscher, and H. F. Dobele, Appl. Phys. A: Mater. Sci. Process. 72, 509 (2001).
36. J.-B. Kim, K. Kawamura, Y. W. Choi, M. D. Bowden, K. Muraoka, and C. Heibig, IEEE Trans. Plasma Sci. 26, 1556 (1998).
37. Y. W. Choi, M. D. Bowden, and K. Muraoka, Appl. Phys. Lett. 69, 1361 (1996).
38. V. P. Gavrilenko et al., Phys. Rev. E 62, 7201 (2000).
39. V. P. Gavrilenko, H. J. Kim, T. Ikutake, J. B. Kim, M. D. Bowden, and K. Muroaoka, Phys. Rev. E 63, 047401 (2001).
40. K. Takizawa, K. Sasaki, and A. Kono, Jpn. J. Appl. Phys., Part 1 41, L1285 (2002).
41. K. Takizawa, K. Sasaki, and A. Kono, Appl. Phys. Lett. 84, 185 (2004).
42. E. V. Barnat and G. A. Hebner, Appl. Phys. Lett. (submitted).
43. S. Bashkin and J. O. Stoner, Atomic Energy Level and Grotrian Diagrams 2 (North-Holland, New York, 1978), p. 173.
44. P. J. Hargis, Jr. et al., Rev. Sci. Instrum. 65, 140 (1994).
45. C. Steinbruchel, J. Vac. Sci. Technol. A 8, 1663 (1990).