|
Volumn 66, Issue 5, 2002, Pages 9-
|
Calculated sheath dynamics under the influence of an asymmetrically pulsed dc bias
a,b a,b |
Author keywords
[No Author keywords available]
|
Indexed keywords
BOLTZMANN TREATMENT;
ENERGY DISTRIBUTION;
ENERGY SPECTRUM;
IONIC FLUXES;
CARRIER CONCENTRATION;
CHARGED PARTICLES;
CONCENTRATION (PROCESS);
IONS;
MATHEMATICAL MODELS;
POISSON EQUATION;
THIN FILMS;
PLASMA SHEATHS;
ARTICLE;
|
EID: 33646971380
PISSN: 1063651X
EISSN: None
Source Type: Journal
DOI: 10.1103/PhysRevE.66.056401 Document Type: Article |
Times cited : (21)
|
References (21)
|