Measured energy distributions of ions driven by an asymmetrically pulsed bias during magnetron sputtering

Journal of Applied Physics

Volumn 92, Issue 6, 2002, Pages 2984-2989

  Barnat, E V ^a   Lu, T M ^a  

^a Research Rensselaer Polytechnic Institute   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIRECT-CURRENT DISCHARGE; ENERGY DISTRIBUTIONS; ION ENERGY DISTRIBUTIONS; LOW FREQUENCY; PULSED BIAS; QUASI-STATIC TREATMENT; TIME-SCALES; WAVE FORMS;

ELECTRIC DISCHARGES; ELECTRIC POWER DISTRIBUTION; PLASMA SOURCES;

IONS;

EID: 18644385998     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1501739     Document Type: Article

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