메뉴 건너뛰기




Volumn 9, Issue 11, 2009, Pages 1472-1478

Harsh Environment Silicon Carbide Sensors for Health and Performance Monitoring of Aerospace Systems: A Review

Author keywords

Aerospace; harsh environment; high temperature sensors; silicon carbide (SiC); structural monitoring

Indexed keywords


EID: 85008030876     PISSN: 1530437X     EISSN: 15581748     Source Type: Journal    
DOI: 10.1109/JSEN.2009.2026996     Document Type: Article
Times cited : (185)

References (50)
  • 2
    • 0041387382 scopus 로고    scopus 로고
    • Fully reversed electromechanical fatigue behavior of composite laminate with embedded piezoelectric actuator/sensor
    • M. Yocum, H. Abramovich, A. Grunwald, and S. Mall, “Fully reversed electromechanical fatigue behavior of composite laminate with embedded piezoelectric actuator/sensor”, Smart Mater. Struct., vol. 12, pp. 556–564, 2003.
    • (2003) Smart Mater. Struct , vol.12 , pp. 556-564
    • Yocum, M.1    Abramovich, H.2    Grunwald, A.3    Mall, S.4
  • 4
    • 0032594982 scopus 로고    scopus 로고
    • Experimental evaluation ofMEMS strain sensors embedded incomposites
    • C. Hautamaki, S. Zurn, S. C. Mantell, and D. L. Polla, “Experimental evaluation ofMEMS strain sensors embedded incomposites”, J. Microelectromech. Syst., vol. 8, no. 3, pp. 272–279, 1999.
    • (1999) J. Microelectromech. Syst , vol.8 , Issue.3 , pp. 272-279
    • Hautamaki, C.1    Zurn, S.2    Mantell, S.C.3    Polla, D.L.4
  • 6
    • 50149113165 scopus 로고    scopus 로고
    • A silicon carbide capacitive pressure sensor for high temperature and harsh environment applications
    • L. Chen and M. Mehregany, “A silicon carbide capacitive pressure sensor for high temperature and harsh environment applications”, in Proc. 14th Int. Conf. Solid-State Sensors, Actuators, Microsyst., 2007, pp. 2597–2600.
    • (2007) Proc. 14th Int. Conf. Solid-State Sensors, Actuators, Microsyst. , pp. 2597-2600
    • Chen, L.1    Mehregany, M.2
  • 7
    • 0033750798 scopus 로고    scopus 로고
    • Silicon carbide as a new MEMS technology
    • P. M. Sarro, “Silicon carbide as a new MEMS technology”, Sens. Actuators, vol. 8, pp. 210–218, 2000.
    • (2000) Sens. Actuators , vol.8 , pp. 210-218
    • Sarro, P.M.1
  • 11
    • 0033512247 scopus 로고    scopus 로고
    • Oxidation behavior of diamond-like carbon films
    • D. Y. Wang, C. L. Changa, and W.-Y. Ho, “Oxidation behavior of diamond-like carbon films”, Surf. Coatings Technol., vol. 120–121, pp. 138–144, 1999.
    • (1999) Surf. Coatings Technol , vol.120 , Issue.121 , pp. 138-144
    • Wang, D.Y.1    Changa, C.L.2    Ho, W.-Y.3
  • 13
    • 0036468068 scopus 로고    scopus 로고
    • Aircraft landing gear failure: fracture of the outer cylinder lug
    • C. R. F. Azevedo, E. Hippert Jr., G. Spera, and P. Geradi, “Aircraft landing gear failure: fracture of the outer cylinder lug”, Eng. Failure Anal., vol. 9, pp. 1–15, 2002.
    • (2002) Eng. Failure Anal , vol.9 , pp. 1-15
    • F. Azevedo, C.R.1    Hippert, E.2    Spera, G.3    Geradi, P.4
  • 14
    • 0035360397 scopus 로고    scopus 로고
    • Ways and options for aircraft structural health management
    • C. Boller, “Ways and options for aircraft structural health management”, Smart Mater. Struct., vol. 10, pp. 432–440, 2001.
    • (2001) Smart Mater. Struct , vol.10 , pp. 432-440
    • Boller, C.1
  • 15
    • 44349162220 scopus 로고    scopus 로고
    • High-cycle fatigue of hybrid carbon nanotube/glass fiber/polymer composites
    • C. S. Grimmer and C. K. H. Dharan, “High-cycle fatigue of hybrid carbon nanotube/glass fiber/polymer composites”, J. Mater. Sci., vol. 43, no. 13, pp. 4487–4492, 2008.
    • (2008) J. Mater. Sci , vol.43 , Issue.13 , pp. 4487-4492
    • Grimmer, C.S.1    Dharan, C.K.H.2
  • 16
    • 42949123490 scopus 로고    scopus 로고
    • Thermally induced loads of fastened hybrid composite/aluminum structures
    • Mar.
    • C. Yang, W. Sun, W. Seneviratne, and A. K. Shashidhar, “Thermally induced loads of fastened hybrid composite/aluminum structures”, J. Aircraft, vol. 45, no. 2, p. 569, Mar. 2008.
    • (2008) J. Aircraft , vol.45 , Issue.2 , pp. 569
    • Yang, C.1    Sun, W.2    Seneviratne, W.3    Shashidhar, A.K.4
  • 17
    • 3442888087 scopus 로고    scopus 로고
    • Corrosion of aircraft structures made of aluminum alloys
    • E. V. Abolikhina and A. G. Molyar, “Corrosion of aircraft structures made of aluminum alloys”, Mater. Sci., vol. 39, no. 6, pp. 889–894, 2003.
    • (2003) Mater. Sci , vol.39 , Issue.6 , pp. 889-894
    • Abolikhina, E.V.1    Molyar, A.G.2
  • 19
    • 0032317721 scopus 로고    scopus 로고
    • Ultrasonic guided wave NDT for hidden corrosion detection
    • W. Zhu, J. L. Rose, J. N. Barshinger, and V. S. Agarwala, “Ultrasonic guided wave NDT for hidden corrosion detection”, Res. Nondestr. Eval., vol. 10, no. 4, pp. 205–225, 1998.
    • (1998) Res. Nondestr. Eval , vol.10 , Issue.4 , pp. 205-225
    • Zhu, W.1    Rose, J.L.2    Barshinger, J.N.3    Agarwala, V.S.4
  • 21
    • 36749001122 scopus 로고    scopus 로고
    • A brief history of aircraft engine development at general electric
    • Cincinnati, OH, 2007, AIAA
    • J. C. Blanton and D. C. Wisler, “A brief history of aircraft engine development at general electric”, presented at the 4th AIAA/ASME/SAE/ ASEE Joint Propulsion Conf. Exhib., Cincinnati, OH, 2007, AIAA 2007–5339.
    • (2007) 4th AIAA/ASME/SAE/ ASEE Joint Propulsion Conf. Exhib.
    • Blanton, J.C.1    Wisler, D.C.2
  • 26
    • 0141964094 scopus 로고    scopus 로고
    • Nitrogen doping of polycrystalline 3C-SiC films grown using 1,3-disilabutane in a conventional LPCVD reactor
    • M. B. J. Wijesundara, D. Gao, C. Carraro, R. T. Howe, and R. Maboudian, “Nitrogen doping of polycrystalline 3C-SiC films grown using 1,3-disilabutane in a conventional LPCVD reactor”, J. Crystal Growth, vol. 259, no. 1–2, pp. 18–25, 2003.
    • (2003) J. Crystal Growth , vol.259 , Issue.1-2 , pp. 18-25
    • J. Wijesundara, M.B.1    Gao, D.2    Carraro, C.3    Howe, R.T.4    Maboudian, R.5
  • 27
    • 0032001410 scopus 로고    scopus 로고
    • Characterization of polycrystalline silicon carbide films grown by atmospheric pressure chemical vapor deposition on polycrystalline silicon
    • C. Zorman, C.-H.W.S. Roy, A. Fleischman, and M. Mehregany, “Characterization of polycrystalline silicon carbide films grown by atmospheric pressure chemical vapor deposition on polycrystalline silicon”, J. Mater. Res., vol. 13, pp. 406–412, 1998.
    • (1998) J. Mater. Res , vol.13 , pp. 406-412
    • Zorman, C.1    Roy, C.-H.W.S.2    Fleischman, A.3    Mehregany, M.4
  • 28
    • 3142711483 scopus 로고    scopus 로고
    • Recent progress toward a manufacturable polycrystalline SiC surface micromachining technology
    • D. Gao, M. B. J. Wijesundara, C. Carraro, R. T. Howe, and R. Maboudian, “Recent progress toward a manufacturable polycrystalline SiC surface micromachining technology”, IEEE Sensors J., vol. 4, pp. 441–448, 2004.
    • (2004) IEEE Sensors J , vol.4 , pp. 441-448
    • Gao, D.1    J. Wijesundara, M.B.2    Carraro, C.3    Howe, R.T.4    Maboudian, R.5
  • 29
    • 67650714862 scopus 로고    scopus 로고
    • Silicon carbide thin films via low pressure chemical vapor deposition for micro- and nano-electromechanical systems
    • Dept. Mech. Eng., Univ. California, Berkeley, CA
    • C. Roper, “Silicon carbide thin films via low pressure chemical vapor deposition for micro- and nano-electromechanical systems”, Ph.D. dissertation, Dept. Mech. Eng., Univ. California, Berkeley, CA, 2007.
    • (2007) Ph.D. dissertation
    • Roper, C.1
  • 30
    • 4043053558 scopus 로고    scopus 로고
    • Threedimensional crystalline SiC nanowire flowers
    • G. W. Ho, A. S. W. Wong, D.-J. Kang, and M. E. Welland, “Threedimensional crystalline SiC nanowire flowers”, Nanotechnology, vol. 15, pp. 996–999, 2004.
    • (2004) Nanotechnology , vol.15 , pp. 996-999
    • Ho, G.W.1    W. Wong, A.S.2    Kang, D.-J.3    Welland, M.E.4
  • 31
  • 32
    • 85008003265 scopus 로고    scopus 로고
    • ®transducer
    • Leonia, NJ. [Online]. Available: www.kulite.com
    • ® transducer”, Kulite Semiconductor Products Inc., Leonia, NJ. [Online]. Available: www.kulite.com
    • Kulite Semiconductor Products Inc.
  • 33
    • 0027608849 scopus 로고
    • Characterization of n-type β-SiC as a piezoresistor
    • Jun.
    • J. S. Shor, D. Goldstein, and A. D. Kurtz, “Characterization of n-type β-SiC as a piezoresistor”, IEEE Trans. Electron Devices, vol. 40, no. 6, pp. 1093–1099, Jun. 1993.
    • (1993) IEEE Trans. Electron Devices , vol.40 , Issue.6 , pp. 1093-1099
    • Shor, J.S.1    Goldstein, D.2    Kurtz, A.D.3
  • 34
    • 0344146579 scopus 로고    scopus 로고
    • A high temperature pressure sensor prepared by selective deposition of cubic silicon carbide on SOI substrates
    • M. Eickhoff, H. Moller, G. Kroetz, J. Berg, and R. Ziermann, “A high temperature pressure sensor prepared by selective deposition of cubic silicon carbide on SOI substrates”, Sens. Actuators A, vol. 74, pp. 56–59, 1999.
    • (1999) Sens. Actuators A , vol.74 , pp. 56-59
    • Eickhoff, M.1    Moller, H.2    Kroetz, G.3    Berg, J.4    Ziermann, R.5
  • 37
    • 9744224355 scopus 로고    scopus 로고
    • Fabrication of a CMOS compatible pressure sensor for harsh environments
    • L. S. Pakula, H. Yang, H. T. M. Pham, P. J. French, and P. M. Sarro, “Fabrication of a CMOS compatible pressure sensor for harsh environments”, J. Micromech. Microeng., vol. 14, pp. 1478–1483, 2004.
    • (2004) J. Micromech. Microeng , vol.14 , pp. 1478-1483
    • Pakula, L.S.1    Yang, H.2    M. Pham, H.T.3    French, P.J.4    Sarro, P.M.5
  • 38
    • 50149113165 scopus 로고    scopus 로고
    • A silicon carbide capacitive pressure sensor for high temperature and harsh environment applications
    • L. Chen and M. Mehregany, “A silicon carbide capacitive pressure sensor for high temperature and harsh environment applications”, in Proc. 14th Int. Conf. Solid-State Sensors, Actuators, Microsys., 2007, pp. 2597–2600.
    • (2007) Proc. 14th Int. Conf. Solid-State Sensors, Actuators, Microsys. , pp. 2597-2600
    • Chen, L.1    Mehregany, M.2
  • 42
    • 80455159259 scopus 로고    scopus 로고
    • Poly-crystalline silicon carbide passivated capacitive MEMS strain gauge for harsh environment
    • Dept. Mech. Eng., Univ. California,, Berkeley
    • B. Jamshidi, “Poly-crystalline silicon carbide passivated capacitive MEMS strain gauge for harsh environment”, Ph.D. dissertation, Dept. Mech. Eng., Univ. California,, Berkeley, 2008.
    • (2008) Ph.D. dissertation
    • Jamshidi, B.1
  • 43
    • 0025512730 scopus 로고
    • SiC thin-film thermistors
    • T. Nagai and M. Itoh, “SiC thin-film thermistors”, IEEE Trans. Ind. Appl., vol. 26, pp. 1139–1143, 1990.
    • (1990) IEEE Trans. Ind. Appl , vol.26 , pp. 1139-1143
    • Nagai, T.1    Itoh, M.2
  • 46
    • 51649145604 scopus 로고
    • Surface morphology of silicon carbide epitaxial films
    • J. A. Powell, D. J. Larkin, and P. B. Abel, “Surface morphology of silicon carbide epitaxial films”, J. Electron. Mater., vol. 24, no. 4, pp. 295–301, 1995.
    • (1995) J. Electron. Mater , vol.24 , Issue.4 , pp. 295-301
    • Powell, J.A.1    Larkin, D.J.2    Abel, P.B.3
  • 50
    • 29044434517 scopus 로고    scopus 로고
    • Silicon-carbide MESFET-based 400°C MEMS sensing and data telemetry
    • Dec.
    • R.Wang, W. H. Ko, and D. J. Young, “Silicon-carbide MESFET-based 400°C MEMS sensing and data telemetry”, IEEE Sensors J., vol. 5, no. 6, pp. 1389–1394, Dec. 2005.
    • (2005) IEEE Sensors J , vol.5 , Issue.6 , pp. 1389-1394
    • Wang, R.1    Ko, W.H.2    Young, D.J.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.