Corrosion enhanced capacitive strain gauge at 370°C

Proceedings of IEEE Sensors

Volumn , Issue , 2007, Pages 804-807

  Jamshidi, Babak ^a   Azevedo, Robert G ^a   Wijesundara, Muthu B J ^a   Pisano, Albert P ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FINITE ELEMENT METHOD; HIGH TEMPERATURE TESTING; NONMETALS; OPTICAL DESIGN; PASSIVATION; RELIABILITY; SENSITIVITY ANALYSIS; SENSORS; SILICON; SILICON CARBIDE; STRAIN GAGES;

ANALYTICAL MODELLING; CORROSION; FINITE ELEMENT ANALYSIS; FULL-SCALE RANGE; HIGH RESOLUTIONS; HIGH TEMPERATURES; INFRA-RED; MECHANICAL NOISES; NO DEFECTS; PASSIVATION LAYERS; SILICON-ON -INSULATOR; STRAIN GAUGE; STRAIN SENSORS;

GAGES;

EID: 48349095569     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSENS.2007.4388522     Document Type: Conference Paper

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