Application of a genetic algorithm in solving the capacity allocation problem with machine dedication in the photolithography area

Journal of Manufacturing Systems

Volumn 41, Issue , 2016, Pages 165-177

  Chen, James C ^a   Chen, Yin Yann ^b   Liang, Yu ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

^b NATIONAL FORMOSA UNIVERSITY   (Taiwan)

Author keywords

Capacity allocation; Capacity planning; Genetic algorithm; Wafer fabrication

Indexed keywords

HEURISTIC ALGORITHMS; INTEGER PROGRAMMING; MANUFACTURE; OPTICAL INSTRUMENTS; PHOTOLITHOGRAPHY; SEMICONDUCTOR DEVICE MANUFACTURE; SILICON WAFERS;

CAPACITY ALLOCATION; CAPACITY PLANNING; COMPUTATIONAL PERFORMANCE; INTEGER PROGRAMMING MODELS; NEAR-OPTIMAL SOLUTIONS; SEMICONDUCTOR INDUSTRY; SEMICONDUCTOR MANUFACTURING INDUSTRY; WAFER FABRICATIONS;

GENETIC ALGORITHMS;

EID: 84987981824     PISSN: 02786125     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jmsy.2016.08.010     Document Type: Article

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