A simulation-based two-stage scheduling methodology for controlling semiconductor wafer fabs

Expert Systems with Applications

Volumn 39, Issue 14, 2012, Pages 11677-11684

  Hu, Hongtao ^a   Zhang, Huai ^b  

^a SHANGHAI MARITIME UNIVERSITY   (China)

^b Shanghai Huali Microelectronics Corporation   (China)

Author keywords

Response surface methodology; Semiconductor wafer fab; Simulation; Two stage scheduling; Vector ordinal optimization

Indexed keywords

COMPUTATION TIME; DESIRABILITY FUNCTION; ORDINAL OPTIMIZATION; PARAMETER OPTIMIZATION; PERFORMANCE INDICES; RESPONSE SURFACE METHODOLOGY; SCHEDULING METHODS; SCHEDULING POLICIES; SEMI-CONDUCTOR WAFER; SEMI-CONDUCTOR WAFER FAB; SIMULATION; SIMULATION-BASED; SINGLE-RULE;

OPTIMIZATION; SCHEDULING ALGORITHMS; SURFACE PROPERTIES;

SCHEDULING;

EID: 84861820416     PISSN: 09574174     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.eswa.2012.04.042     Document Type: Article

References (29)

1. C.H. Chen, D. He, and M. Fu Efficient dynamic simulation allocation in ordinal optimization IEEE Transactions on Automatic Control 51 12 2006 2005 2009 (Pubitemid 46002298)
2. T.L. Chen A self-adaptive agent-based fuzzy-neural scheduling system for a wafer fabrication factory Expert Systems with Applications 38 6 2011 7158 7168
3. H.-C. Cheng, and T.-C. Chiang A two-stage hybrid memetic algorithm for multiobjective job shop scheduling Expert Systems with Applications 38 9 2011 10983 10998
4. H.-S. Choi, and J.-S. Kim Real-time scheduling for reentrant hybrid flow shops: A decision tree based mechanism and its application to a TFT-LCD line Expert Systems with Applications 38 4 2011 3514 3521
5. R.M. Dabbas, H.N. Chen, J.W. Fowler, and D. Shunk A combined dispatching criteria approach to scheduling semiconductor manufacturing systems Computers and Industrial Engineering 39 3-4 2001 307 324 (Pubitemid 32380884)
6. R.M. Dabbas, and J.W. Fowler A new scheduling approach using combined dispatching criteria in wafer fabs IEEE Transactions on Semiconductor Manufacturing 16 3 2003 501 510
7. R.M. Dabbas, J.W. Fowler, D.A. Rollier, and D. Mccarville Multiple response optimization using mixture-designed experiments and desirability functions in semiconductor scheduling International Journal of Production Research 41 5 2003 939 961
8. G.C. Derringer, and R. Suich Simultaneous optimization of several response variables Journal of Quality Technology 12 1980 214 219
9. Feigin, G., Fowler, J. W., Leachman, R. & Al., E. (1994). Test beds. Available from World Wide Web: ().
10. Y.C. Ho, R.S. Sreenivas, and P. Vakili Ordinal optimization of deds Discrete Event Dynamic Systems 2 1 1992 61 88
11. B.W. Hsieh, C.H. Chen, and S.C. Chang Scheduling semiconductor wafer fabrication by using ordinal optimization-based simulation IEEE Transactions on Robotics and Automation 17 5 2001 599 608
12. B.W. Hsieh, C.H. Chen, and S.C. Chang Efficient simulation-based composition of scheduling policies by integrating ordinal optimization with design of experiment IEEE Transactions on Automation Science and Engineering 4 4 2007 553 568
13. S. Hsieh, and K.C. Hou Production-flow-value-based job dispatching method for semiconductor manufacturing International Journal of Advanced Manufacturing Technology 30 7-8 2006 727 737 (Pubitemid 44411202)
14. Y.F. Hung, and I.R. Chen A simulation study of dispatch rules for reducing flow times in semiconductor wafer fabrication Production Planning and Control 9 7 1998 714 722
15. P.R. Kumar Scheduling semiconductor manufacturing plants IEEE Control Systems Magazine 14 6 1994 33 40
16. S. Kumar, and D.A. Nottestad Integrated simulation application design for short-term production scheduling IIE Transactions (Institute of Industrial Engineers) 38 9 2006 737 748 (Pubitemid 44083999)
17. S. Li, T. Tang, and D.W. Collins Minimum inventory variability schedule with applications in semiconductor fabrication IEEE Transactions on Semiconductor Manufacturing 9 1 1996 145 149 (Pubitemid 126784474)
18. S.C.H. Lu, D. Ramaswamy, and P.R. Kumar Efficient scheduling policies to reduce mean and variance of cycle-time in semiconductor manufacturing plants IEEE Transactions on Semiconductor Manufacturing 7 3 1994 374 388
19. H.S. Min, and Y. Yih Development of a real-time multi-objective scheduler for a semiconductor fabrication system International Journal of Production Research 41 10 2003 2345 2364
20. D.C. Montgomery Design and analysis of experiments 5th ed. 2001 Wiley New York
21. T. Nakata, K. Matsui, Y. Miyake, and K. Nishioka Dynamic bottleneck control in wide variety production factory IEEE Transactions on Semiconductor Manufacturing 12 3 1999 273 280 (Pubitemid 30507657)
22. Nist/Sematech (2003). E-handbook of statistical methods [online]. Available from: Available from: [Accessed 12/212011].
23. S.C. Sarin, A. Varadarajan, and L. Wang A survey of dispatching rules for operational control in wafer fabrication Production Planning and Control 22 1 2011 4 24
24. E. Tekin, and I. Sabuncuoglu Simulation optimization: A comprehensive review on theory and applications IIE Transactions (Institute of Industrial Engineers) 36 11 2004 1067 1081
25. J.C. Tyan, J.C. Chen, and F.K. Wang Development of a state-dependent dispatch rule using theory of constraints in near-real-world wafer fabrication Production Planning and Control 13 3 2002 253 261 (Pubitemid 34586379)
26. M.C. Wu, Y.L. Huang, Y.C. Chang, and K.F. Yang Dispatching in semiconductor fabs with machine-dedication features International Journal of Advanced Manufacturing Technology 28 9 2006 978 984
27. Zhao, Q. C., Ho, Y. C., & Jia, Q. S. (2004). Vector ordinal optimization, technical report. Available from: http://cfins.au.tsinghua.edu.cn/ personalhg/jiaqingshan/ZhaoHoJiaVOO2004.pdf.
28. Q.C. Zhao, Y.C. Ho, and Q.S. Jia Vector ordinal optimization Journal of Optimization Theory and Applications 125 2 2005 259 274 (Pubitemid 40572570)
29. H.-J. Zimmermann Fuzzy sets theory: And its applications: Boston 1993 Kluwer MA