Family-based scheduling rules of a sequence-dependent wafer fabrication system

IEEE Transactions on Semiconductor Manufacturing

Volumn 16, Issue 1, 2003, Pages 15-24

  Chern, Ching Chin ^a   Liu, Yu Lien ^b,c  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

^b Acer Inc   (Taiwan)

^c Brooks PRI Automation   (Taiwan)

Author keywords

Dispatching rule; Family based scheduling; Sequence dependent manufacturing; Wafer fabrication

Indexed keywords

ALGORITHMS; APPROXIMATION THEORY; COMPUTER SIMULATION; MASKS; PHOTOLITHOGRAPHY; SCHEDULING; SERVERS; SILICON WAFERS; THEOREM PROVING;

FAMILY-BASED SCHEDULING RULE; JOB SCHEDULING; MULTIPLE JOB REENTRANCE MANUFACTURING SYSTEM; THRESHOLD CONTROL; WAFER FABRICATION SYSTEM;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0037325947     PISSN: 08946507     EISSN: None     Source Type: Journal    
DOI: 10.1109/TSM.2002.807742     Document Type: Article

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