Assessment of potential gains in productivity due to proactive reticle management using discrete event simulation

Winter Simulation Conference Proceedings

Volumn 1, Issue , 1999, Pages 856-864

  Park, Sungmin ^a   Fowler, John ^a   Carlyle, Matt ^a   Hickie, Matt ^a  

^a ARIZONA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; DISCRETE TIME CONTROL SYSTEMS; INDUSTRIAL MANAGEMENT; MATHEMATICAL MODELS; PHOTOLITHOGRAPHY; PRODUCTIVITY; SEMICONDUCTOR DEVICE MANUFACTURE; STRATEGIC PLANNING;

DISCRETE EVENT SIMULATION; NETWORK FLOW MODEL; PROACTIVE RETICLE MANAGEMENT; TACTICAL RETICLE MANAGEMENT;

COMPUTER INTEGRATED MANUFACTURING;

EID: 0033324608     PISSN: 02750708     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1145/324138.324537     Document Type: Conference Paper

References (2)