Intelligent simulation-based lot scheduling of photolithography toolsets in a wafer fabrication facility

Proceedings - Winter Simulation Conference

Volumn 2, Issue , 2004, Pages 1935-1942

  Arisha, Amr ^a   Young, Paul ^a  

^a DUBLIN CITY UNIVERSITY   (Ireland)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; DIELECTRIC MATERIALS; MARKETING; MATHEMATICAL MODELS; MICROPROCESSOR CHIPS; NETWORKS (CIRCUITS); PHOTOLITHOGRAPHY; SCHEDULING;

ANALYSIS OF VARIANCE (ANOVA); HYBRID PHOTOLITHOGRAPHY; WAFER FABRICATION; WORK-IN-PROGRESS (WIP);

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 17744381413     PISSN: 08917736     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (13)

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