Dispatching in semiconductor fabs with machine-dedication features

International Journal of Advanced Manufacturing Technology

Volumn 28, Issue 9, 2006, Pages 978-984

  Wu, M C ^a   Huang, Y L ^a   Chang, Y C ^a   Yang, K F ^a  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

Author keywords

Dispatching; Machine dedication; Semiconductor; Stepper

Indexed keywords

ALGORITHMS; BENCHMARKING; COMPUTER SIMULATION; MACHINING; MATHEMATICAL MODELS; THROUGHPUT;

DISPATCHING; MACHINE-DEDICATION; STARVATION AVOIDANCE (SA); STEPPER;

SEMICONDUCTOR MATERIALS;

EID: 33646191396     PISSN: 02683768     EISSN: 14333015     Source Type: Journal    
DOI: 10.1007/s00170-004-2431-x     Document Type: Article

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