A sequential solution methodology for capacity allocation and lot scheduling problems for photolithography

Proceedings of the IEEE/CPMT International Electronics Manufacturing Technology (IEMT) Symposium

Volumn , Issue , 2000, Pages 374-381

  Akcali E ^a   Uzsoy, R ^a  

^a SCHOOL OF INDUSTRIAL ENGINEERING   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; MATHEMATICAL MODELS; RESOURCE ALLOCATION; SCHEDULING; SEMICONDUCTOR DEVICE MANUFACTURE;

CAPACITY ALLOCATION; LOT SCHEDULING;

PHOTOLITHOGRAPHY;

EID: 0034447798     PISSN: 10898190     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

1. On practical resource allocation for production planning and scheduling with period overlapping setups
2. Reporting the precision of simulation experiments
3. A capacity allocation problem with integer side constraints
4. A review of production planning and scheduling models in semiconductor industry-Part I: System characteristics, performance evaluation and production planning
5. A review of production planning and scheduling models in semiconductor industry-Part II: Shop-floor control