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Volumn 64, Issue 1, 2013, Pages 524-535

Enhancing rule-based scheduling in wafer fabrication facilities by evolutionary algorithms: Review and opportunity

Author keywords

Dispatching rules; Evolutionary algorithms; Scheduling; Wafer fabrication

Indexed keywords

FABRICATION; LARGE SCALE SYSTEMS; MULTIOBJECTIVE OPTIMIZATION; SCHEDULING; SCHEDULING ALGORITHMS;

EID: 84881614672     PISSN: 03608352     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.cie.2012.08.009     Document Type: Short Survey
Times cited : (27)

References (102)
  • 1
    • 27844498692 scopus 로고    scopus 로고
    • The modified critical ratio: Towards sequencing with a continuous decision domain
    • DOI 10.1080/00207540500137571
    • Abu-Suleiman, A., Pratt, D. B., & Boardman, B. (2005). The modified critical ratio: Towards sequencing with a continuous decision domain. International Journal of Production Research, 43(15), 3287-3296. (Pubitemid 41657437)
    • (2005) International Journal of Production Research , vol.43 , Issue.15 , pp. 3287-3296
    • Abu-Suleiman, A.1    Pratt, D.B.2    Boardman, B.3
  • 2
    • 0023977010 scopus 로고
    • The shifting bottleneck procedure for job shop scheduling
    • Adams, J., Balas, E., & Zawack, D. (1988). The shifting bottleneck procedure for job shop scheduling. Management Science, 34(3), 391-401.
    • (1988) Management Science , vol.34 , Issue.3 , pp. 391-401
    • Adams, J.1    Balas, E.2    Zawack, D.3
  • 4
    • 0036808672 scopus 로고    scopus 로고
    • Parallelism and evolutionary algorithms
    • DOI 10.1109/TEVC.2002.800880
    • Alba, E., & Tomassini, M. (2002). Parallelism and evolutionary algorithms. IEEE Transactions on Evolutionary Computation, 6(5), 443-462. (Pubitemid 35327563)
    • (2002) IEEE Transactions on Evolutionary Computation , vol.6 , Issue.5 , pp. 443-462
    • Alba, E.1    Tomassini, M.2
  • 6
    • 0242653680 scopus 로고    scopus 로고
    • Use of genetic algorithms to solve production and operations management problems: A review
    • Aytug, H., Khouja, M., & Vergara, F. E. (2003). Use of genetic algorithms to solve production and operations management problems: A review. International Journal of Production Research, 41(17), 3955-4009.
    • (2003) International Journal of Production Research , vol.41 , Issue.17 , pp. 3955-4009
    • Aytug, H.1    Khouja, M.2    Vergara, F.E.3
  • 7
    • 0032095531 scopus 로고    scopus 로고
    • A spatial rule adaptation procedure for reliable production control in a wafer fabrication system
    • Baek, D. H., Yoon, W. C., & Part, S. C. (1998). A spatial rule adaptation procedure for reliable production control in a wafer fabrication system. International Journal of Production Research, 36(6), 147-1491.
    • (1998) International Journal of Production Research , vol.36 , Issue.6 , pp. 147-1491
    • Baek, D.H.1    Yoon, W.C.2    Part, S.C.3
  • 8
    • 46149099616 scopus 로고    scopus 로고
    • A simulation study of new multi-objective composite dispatching rules, CONWIP, and push lot release in semiconductor fabrication
    • Bahaji, N., & Kuhl, M. E. (2008). A simulation study of new multi-objective composite dispatching rules, CONWIP, and push lot release in semiconductor fabrication. International Journal of Production Research, 45(14), 3801-3824.
    • (2008) International Journal of Production Research , vol.45 , Issue.14 , pp. 3801-3824
    • Bahaji, N.1    Kuhlm, E.2
  • 9
    • 0032074551 scopus 로고    scopus 로고
    • The impact of priority rule combinations on lateness and tardiness
    • Barman, S. (1998). The impact of priority rule combinations on lateness and tardiness. IIE Transactions, 30(5), 495-504. (Pubitemid 128728479)
    • (1998) IIE Transactions (Institute of Industrial Engineers) , vol.30 , Issue.5 , pp. 495-504
    • Barman, S.1
  • 10
    • 77955308077 scopus 로고    scopus 로고
    • Parallel hybrid metaheuristics for the flexible job shop problem
    • Bozejko, W., Uchron ski, M., & Wodecki, M. (2010). Parallel hybrid metaheuristics for the flexible job shop problem. Computers & Industrial Engineering, 59(2), 323-333.
    • (2010) Computers & Industrial Engineering , vol.59 , Issue.2 , pp. 323-333
    • Bozejko, W.1    Uchronski, M.2    Wodecki, M.3
  • 12
    • 33947668815 scopus 로고    scopus 로고
    • Parallel machine scheduling subject to auxiliary resource constraints
    • DOI 10.1080/09537280601035836, PII 773628441
    • Cakici, E., & Mason, S. J. (2007). Parallel machine scheduling subject to auxiliary resource constraints. International Journal of Production Research, 18(3), 217-225. (Pubitemid 46492027)
    • (2007) Production Planning and Control , vol.18 , Issue.3 , pp. 217-225
    • Cakici, E.1    Mason, S.J.2
  • 13
    • 79958153366 scopus 로고    scopus 로고
    • A comparison of genetic programming and artificial neural networks in metamodeling of discrete-event simulation models
    • Can, B., & Heavey, C. (2012). A comparison of genetic programming and artificial neural networks in metamodeling of discrete-event simulation models. Computers & Operations Research, 39(2), 424-436.
    • (2012) Computers & Operations Research , vol.39 , Issue.2 , pp. 424-436
    • Can, B.1    Heavey, C.2
  • 15
    • 27844503922 scopus 로고    scopus 로고
    • Application of genetic algorithms in production and operations management: A review
    • DOI 10.1080/00207540500143199
    • Chaudhry, S. S., & Luo, W. (2005). Application of genetic algorithms in production and operations management: a review. International Journal of Production Research, 43(19), 4083-4101. (Pubitemid 41657424)
    • (2005) International Journal of Production Research , vol.43 , Issue.19 , pp. 4083-4101
    • Chaudhry, S.S.1    Luo, W.2
  • 18
    • 52649152349 scopus 로고    scopus 로고
    • A study of the flexible job shop scheduling problem with parallel machines and reentrant process
    • Chen, J. C., Chen, K. H., Wu, J. J., & Chen, C. W. (2008). A study of the flexible job shop scheduling problem with parallel machines and reentrant process. International Journal of Advanced Manufacturing Technology, 39(3-4), 344-354.
    • (2008) International Journal of Advanced Manufacturing Technology , vol.39 , Issue.3-4 , pp. 344-354
    • Chen, J.C.1    Chen, K.H.2    Wu, J.J.3    Chen, C.W.4
  • 19
    • 0035485508 scopus 로고    scopus 로고
    • Petri-net and GA-based approach to modeling, scheduling, and performance evaluation for wafer fabrication
    • Chen, J. H., Fu, L. C., Lin, M. H., & Huang, A. C. (2001). Petri-net and GA-based approach to modeling, scheduling, and performance evaluation for wafer fabrication. IEEE Transactions on Robotics and Automation, 17(5), 619-636.
    • (2001) IEEE Transactions on Robotics and Automation , vol.17 , Issue.5 , pp. 619-636
    • Chen, J.H.1    Fu, L.C.2    Lin, M.H.3    Huang, A.C.4
  • 20
    • 0030242695 scopus 로고    scopus 로고
    • A tutorial survey of job-shop scheduling problems using genetic algorithms - I
    • DOI 10.1016/0360-8352(96)00047-2
    • Cheng, R., Gen, M., & Tsujimura, Y. (1996). A tutorial survey of job-shop scheduling problems using genetic algorithms, Part I: Representation. Computers & Industrial Engineering, 30(4), 983-997. (Pubitemid 126375908)
    • (1996) Representation Computers and Industrial Engineering , vol.30 , Issue.4 , pp. 983-997
    • Cheng, R.1    Gen, M.2    Tsujimura, Y.3
  • 21
    • 79952403210 scopus 로고    scopus 로고
    • Model simplification for accelerating simulation-based evaluation of dispatching rules in wafer fabrication facilities
    • automation, robotics, and vision
    • Chiang, T. C. (2010). Model simplification for accelerating simulation-based evaluation of dispatching rules in wafer fabrication facilities. In 11th International conference on control, automation, robotics, and vision, 2005-2011.
    • (2010) 11th International Conference on Control , pp. 2005-2011
    • Chiang, T.C.1
  • 23
    • 11244296542 scopus 로고    scopus 로고
    • Parameter tuning of production scheduling rules by an ant system-embedded genetic algorithm
    • Automation, and Mechatronics
    • Chiang, T. C., & Fu, L. C. (2004). Parameter tuning of production scheduling rules by an ant system-embedded genetic algorithm. IEEE International Conference on Robotics, Automation, and Mechatronics, 1089-1094.
    • (2004) IEEE International Conference on Robotics , pp. 1089-1094
    • Chiang, T.C.1    Fu, L.C.2
  • 24
    • 33746441144 scopus 로고    scopus 로고
    • Modeling, scheduling, and performance evaluation for wafer fabrication: A queueing colored Petri-net and GA-based approach
    • Chiang, T. C., Huang, A. C., & Fu, L. C. (2006). Modeling, scheduling, and performance evaluation for wafer fabrication: A queueing colored Petri-net and GA-based approach. IEEE Transactions on Automation Science and Engineering, 3(3), 330-337.
    • (2006) IEEE Transactions on Automation Science and Engineering , vol.3 , Issue.3 , pp. 330-337
    • Chiang, T.C.1    Huang, A.C.2    Fu, L.C.3
  • 25
    • 46149091552 scopus 로고    scopus 로고
    • A new paradigm for rule-based scheduling in the wafer probe center
    • Chiang, T. C., Shen, Y. S., & Fu, L. C. (2008). A new paradigm for rule-based scheduling in the wafer probe center. International Journal of Production Research, 46(15), 4111-4133.
    • (2008) International Journal of Production Research , vol.46 , Issue.15 , pp. 4111-4133
    • Chiang, T.C.1    Shen, Y.S.2    Fu, L.C.3
  • 26
    • 34249729418 scopus 로고    scopus 로고
    • A novel timetabling algorithm for a furnace process for semiconductor fabrication with constrained waiting and frequencybased setups
    • Chien, C. F., & Chen, C. H. (2007a). A novel timetabling algorithm for a furnace process for semiconductor fabrication with constrained waiting and frequencybased setups. OR Spectrum, 29(3), 391-419.
    • (2007) OR Spectrum , vol.29 , Issue.3 , pp. 391-419
    • Chien, C.F.1    Chen, C.H.2
  • 27
    • 33947276184 scopus 로고    scopus 로고
    • Using genetic algorithms (GA) and a coloured timed Petri net (CTPN) for modeling the optimization-based schedule generator of a generic production scheduling system
    • Chien, C. F., & Chen, C. H. (2007b). Using genetic algorithms (GA) and a coloured timed Petri net (CTPN) for modeling the optimization-based schedule generator of a generic production scheduling system. International Journal of Production Research, 45(8), 1763-1789.
    • (2007) International Journal of Production Research , vol.45 , Issue.8 , pp. 1763-1789
    • Chien, C.F.1    Chen, C.H.2
  • 28
    • 33644978280 scopus 로고    scopus 로고
    • Evolutionary multi-objective optimization: A historical view of the field
    • Coello, C. A. C. (2006). Evolutionary multi-objective optimization: a historical view of the field. IEEE Computational Intelligence Magazine, 1(1), 28-36.
    • (2006) IEEE Computational Intelligence Magazine , vol.1 , Issue.1 , pp. 28-36
    • Coello, C.A.C.1
  • 30
    • 79551635874 scopus 로고    scopus 로고
    • A review of the research methodology for the reentrant scheduling problem
    • Danping, L., & Lee, C. K. M. (2011). A review of the research methodology for the reentrant scheduling problem. International Journal of Production Research, 49(8), 2221-2242.
    • (2011) International Journal of Production Research , vol.49 , Issue.8 , pp. 2221-2242
    • Danping, L.1    Lee, C.K.M.2
  • 32
    • 0036530772 scopus 로고    scopus 로고
    • A fast and elitist multiobjective genetic algorithm: NSGA-II
    • DOI 10.1109/4235.996017, PII S1089778X02041012
    • Deb, K., Pratap, A., Agarwal, S., & Meyarivan, A. (2002). A fast and elitist multiobjective genetic algorithm: NSGA-II. IEEE Transactions on Evolutionary Computation, 6(2), 182-197. (Pubitemid 34555372)
    • (2002) IEEE Transactions on Evolutionary Computation , vol.6 , Issue.2 , pp. 182-197
    • Deb, K.1    Pratap, A.2    Agarwal, S.3    Meyarivan, T.4
  • 33
    • 77953622630 scopus 로고    scopus 로고
    • A parallel genetic algorithm for a flexible jobshop scheduling problem with sequence dependent setups
    • Defersha, F. M., & Chen, M. (2010). A parallel genetic algorithm for a flexible jobshop scheduling problem with sequence dependent setups. International Journal of Advanced Manufacturing Technologies, 49(1-4), 263-279.
    • (2010) International Journal of Advanced Manufacturing Technologies , vol.49 , Issue.1-4 , pp. 263-279
    • Defersha, F.M.1    Chen, M.2
  • 34
    • 0034229139 scopus 로고    scopus 로고
    • Recent developments in evolutionary computation for manufacturing optimization: Problems, solutions, and comparisons
    • Dimopoulos, C., & Zalzala, A. M. S. (2003). Recent developments in evolutionary computation for manufacturing optimization: Problems, solutions, and comparisons. IEEE Transactions on Evolutionary Computation, 4(2), 93-113.
    • (2003) IEEE Transactions on Evolutionary Computation , vol.4 , Issue.2 , pp. 93-113
    • Dimopoulos, C.1    Zalzala, A.M.S.2
  • 35
    • 0029215084 scopus 로고
    • Evolution based learning in a job shop scheduling environment
    • Dorndorf, U., & Pesch, E. (1995). Evolution based learning in a job shop scheduling environment. Computers & Operations Research, 22(1), 25-40.
    • (1995) Computers & Operations Research , vol.22 , Issue.1 , pp. 25-40
    • Dorndorf, U.1    Pesch, E.2
  • 36
    • 36348991068 scopus 로고    scopus 로고
    • Learning effective dispatching rules for batch processor scheduling
    • DOI 10.1080/00207540600993360, PII 770289106
    • Geiger, C. D., & Uzsoy, R. (2008). Learning effective dispatching rules for batch processor scheduling. International Journal of Production Research, 46(6), 1431-1454. (Pubitemid 350157675)
    • (2008) International Journal of Production Research , vol.46 , Issue.6 , pp. 1431-1454
    • Geiger, C.D.1    Uzsoy, R.2
  • 37
    • 30344458483 scopus 로고    scopus 로고
    • Rapid modeling and discovery of priority dispatching rules: An autonomous learning approach
    • DOI 10.1007/s10951-006-5591-8
    • Geiger, C. D., Uzsoy, R., & Aytug, H. (2006). Rapid modeling and discovery of priority dispatching rules: An autonomous learning approach. Journal of Scheduling, 9(1), 7-34. (Pubitemid 43063747)
    • (2006) Journal of Scheduling , vol.9 , Issue.1 , pp. 7-34
    • Geiger, C.D.1    Uzsoy, R.2    Aytug, H.3
  • 38
    • 60549100127 scopus 로고    scopus 로고
    • Evolutionary techniques for optimization problems in integrated manufacturing system: State-Of-The-Art-Survey
    • Gen, M., Lin, L., & Zhang, H. (2009). Evolutionary techniques for optimization problems in integrated manufacturing system: State-of-the-art- survey. Computers & Industrial Engineering, 56(3), 779-808.
    • (2009) Computers & Industrial Engineering , vol.56 , Issue.3 , pp. 779-808
    • Gen, M.1    Lin, L.2    Zhang, H.3
  • 41
    • 33750548214 scopus 로고    scopus 로고
    • Operational planning and control of semiconductor wafer production
    • DOI 10.1080/09537280600900733, PII K2343P41X032W260
    • Gupta, J. N. D., Ruiz, R., Fowler, J. W., & Mason, S. J. (2006). Operational planning and control of semiconductor wafer production. Production Planning & Control, 17(7), 639-647. (Pubitemid 44673510)
    • (2006) Production Planning and Control , vol.17 , Issue.7 , pp. 639-647
    • Gupta, J.N.D.1    Ruiz, R.2    Fowler, J.W.3    Mason, S.J.4
  • 42
    • 31644451948 scopus 로고    scopus 로고
    • Job shop scheduling techniques in semiconductor manufacturing
    • DOI 10.1007/s00170-004-2296-z
    • Gupta, A. K., & Sivakumar, A. I. (2006). Job shop scheduling techniques in semiconductor manufacturing. International Journal of Advanced Manufacturing Technology, 27(11-12), 1163-1169. (Pubitemid 43170416)
    • (2006) International Journal of Advanced Manufacturing Technology , vol.27 , Issue.11-12 , pp. 1163-1169
    • Gupta, A.K.1    Sivakumar, A.I.2
  • 43
    • 17444412326 scopus 로고    scopus 로고
    • Evolutionary scheduling: A review
    • DOI 10.1007/s10710-005-7580-7
    • Hart, E., Ross, P., & Corne, D. (2005). Evolutionary scheduling: a review. Genetic Programming and Evolvable Machines, 6(2), 191-220. (Pubitemid 40536281)
    • (2005) Genetic Programming and Evolvable Machines , vol.6 , Issue.2 , pp. 191-220
    • Hart, E.1    Ross, P.2    Corne, D.3
  • 45
    • 0037294640 scopus 로고    scopus 로고
    • Acceleration of the convergence speed of evolutionary algorithms using multi-layer neural networks
    • Hong, Y. S., Lee, H., & Tahk, M. J. (2003). Acceleration of the convergence speed of evolutionary algorithms using multi-layer neural networks. Engineering Optimization, 35(1), 91-203.
    • (2003) Engineering Optimization , vol.35 , Issue.1 , pp. 91-203
    • Hong, Y.S.1    Lee, H.2    Tahk, M.J.3
  • 46
    • 33750698473 scopus 로고    scopus 로고
    • A genetic algorithm approach to manage ion implantation processes in wafer fabrication
    • DOI 10.1504/IJMTM.2000.001339
    • Horng, S. M., Fowler, J. W., & Cochran, J. K. (2000). A genetic algorithm approach to manage ion implantation in wafer fabrication. International Journal of Manufacturing Technology and Management, 1(2/3), 156-172. (Pubitemid 33299555)
    • (2000) International Journal of Manufacturing Technology and Management , vol.1 , Issue.2-3 , pp. 156-172
    • Horng, S.-M.1    Fowler, J.W.2    Cochran, J.K.3
  • 47
    • 0027842088 scopus 로고
    • Practical issues in scheduling and dispatching in semiconductor wafer fabrication
    • Johri, P. K. (1993). Practical issues in scheduling and dispatching in semiconductor wafer fabrication. Journal of Manufacturing Systems, 12(6), 474-485.
    • (1993) Journal of Manufacturing Systems , vol.12 , Issue.6 , pp. 474-485
    • Johri, P.K.1
  • 48
    • 0037116761 scopus 로고    scopus 로고
    • Multi-objective meta-heuristics: An overview of the current state-of-The-Art
    • DOI 10.1016/S0377-2217(01)00123-0, PII S0377221701001230
    • Jones, D. F., Mirrazavi, S. K., & Tamiz, M. (2002). Multi-objective meta-heuristics: An overview of the current state-of-the-art. European Journal of Operational Research, 137(1), 1-9. (Pubitemid 33126005)
    • (2002) European Journal of Operational Research , vol.137 , Issue.1 , pp. 1-9
    • Jones, D.F.1    Mirrazavi, S.K.2    Tamiz, M.3
  • 49
    • 0034863831 scopus 로고    scopus 로고
    • An efficient genetic algorithm with less fitness evaluations by clustering
    • Kim, H. S., & Cho, S. B. (2001). An efficient genetic algorithm with less fitness evaluations by clustering. IEEE Congress on Evolutionary Computation, 887-894.
    • (2001) IEEE Congress on Evolutionary Computation , pp. 887-894
    • Kim, H.S.1    Cho, S.B.2
  • 50
    • 0035485317 scopus 로고    scopus 로고
    • Production scheduling in a semiconductor wafer fabrication facility producing multiple product types with distinct due dates
    • DOI 10.1109/70.964660, PII S1042296X01097452
    • Kim, Y. D., Kim, J. G., Choi, B., & Kim, H. U. (2001). Production scheduling in a semiconductor wafer fabrication facility producing multiple product types with distinct due dates. IEEE Transactions on Robotics and Automation, 17(5), 589-598. (Pubitemid 33137775)
    • (2001) IEEE Transactions on Robotics and Automation , vol.17 , Issue.5 , pp. 589-598
    • Kim, Y.-D.1    Kim, J.-G.2    Choi, B.3    Kim, H.-U.4
  • 51
    • 0037954326 scopus 로고    scopus 로고
    • Simplification methods for accelerating simulation-based real-time scheduling in a semiconductor wafer fabrication facility
    • Kim, Y. D., Shim, S. O., Choi, B., & Hwang, H. (2003). Simplification methods for accelerating simulation-based real-time scheduling in a semiconductor wafer fabrication facility. IEEE Transactions on Semiconductor Manufacturing, 16(2), 290-298.
    • (2003) IEEE Transactions on Semiconductor Manufacturing , vol.16 , Issue.2 , pp. 290-298
    • Kim, Y.D.1    Shim, S.O.2    Choi, B.3    Hwang, H.4
  • 52
    • 31744437433 scopus 로고    scopus 로고
    • ParEGO: A hybrid algorithm with on-line landscape approximation for expensive multiobjective optimization problems
    • DOI 10.1109/TEVC.2005.851274
    • Knowles, J. (2006). ParEGO: A hybrid algorithm with on-line landscape approximation for expensive multiobjective optimization problems. IEEE Transactions on Evolutionary Computation, 10(1), 50-66. (Pubitemid 43174985)
    • (2006) IEEE Transactions on Evolutionary Computation , vol.10 , Issue.1 , pp. 50-66
    • Knowles, J.1
  • 53
    • 33845580428 scopus 로고    scopus 로고
    • AI and or in management of operations: History and trends
    • DOI 10.1057/palgrave.jors.2602132, PII 2602132
    • Kobbacy, K. A. H., Vadera, S., & Rasmy, M. H. (2007). AI and OR in management of operations: History and trends. Journal of the Operational Research Society, 58(1), 10-28. (Pubitemid 44930738)
    • (2007) Journal of the Operational Research Society , vol.58 , Issue.1 , pp. 10-28
    • Kobbacy, K.A.H.1    Vadera, S.2    Rasmy, M.H.3
  • 55
    • 53949094990 scopus 로고    scopus 로고
    • Multi-objective scheduling and real-time dispatching for the semiconductor manufacturing system
    • Lee, Y. F., Jiang, Z. B., & Liu, H. R. (2009). Multi-objective scheduling and real-time dispatching for the semiconductor manufacturing system. Computers & Operations Research, 36(3), 866-884.
    • (2009) Computers & Operations Research , vol.36 , Issue.3 , pp. 866-884
    • Lee, Y.F.1    Jiang, Z.B.2    Liu, H.R.3
  • 57
    • 1842843004 scopus 로고    scopus 로고
    • Genetic algorithm using sequence rule chain for multiobjective optimization in re-entrant micro-electronic production line
    • Liu, M., & Wu, C. (2004). Genetic algorithm using sequence rule chain for multiobjective optimization in re-entrant micro-electronic production line. Robotics and Computer-Integrated Manufacturing, 20(3), 225-236.
    • (2004) Robotics and Computer-Integrated Manufacturing , vol.20 , Issue.3 , pp. 225-236
    • Liu, M.1    Wu, C.2
  • 59
    • 33746921229 scopus 로고    scopus 로고
    • A literature review, classification and simple meta-analysis on scheduling of batch processors in semiconductor
    • DOI 10.1007/s00170-005-2585-1
    • Mathirajan, M., & Sivakumar, A. I. (2006). A literature review, classification and simple meta-analysis on scheduling of batch processors in semiconductor. International Journal of Advanced Manufacturing Technology, 29(9-10), 990-1001. (Pubitemid 44195225)
    • (2006) International Journal of Advanced Manufacturing Technology , vol.29 , Issue.9-10 , pp. 990-1001
    • Mathirajan, M.1    Sivakumar, A.I.2
  • 60
    • 0242301653 scopus 로고    scopus 로고
    • Selection of dispatching rules on multiple dispatching decision points in real-time scheduling of a semiconductor wafer fabrication system
    • Min, H., & Yih, Y. (2003). Selection of dispatching rules on multiple dispatching decision points in real-time scheduling of a semiconductor wafer fabrication system. International Journal of Production Research, 41(16), 3921-3941.
    • (2003) International Journal of Production Research , vol.41 , Issue.16 , pp. 3921-3941
    • Min, H.1    Yih, Y.2
  • 61
    • 13544273189 scopus 로고    scopus 로고
    • Decentralised, multi-objective driven scheduling for reentrant shops: A conceptual development and a test case
    • DOI 10.1016/j.ejor.2004.07.013, PII S0377221704004709, Multicriteria Scheduling
    • Miragliotta, G., & Perona, M. (2005). Decentralised, multi-objective driven scheduling for reentrant shops: A conceptual development and a test case. European Journal of Operational Research, 167(3), 644-662. (Pubitemid 40220083)
    • (2005) European Journal of Operational Research , vol.167 , Issue.3 , pp. 644-662
    • Miragliotta, G.1    Perona, M.2
  • 63
    • 84855921402 scopus 로고    scopus 로고
    • A survey of problems, solution techniques, and future challenges in scheduling semiconductor manufacturing operations
    • Mnch, L., Fowler, J. W., Dauzre-Prs, S., Mason, S. J., & Rose, O. (2011). A survey of problems, solution techniques, and future challenges in scheduling semiconductor manufacturing operations. Journal of Scheduling, 14(6), 583-599.
    • (2011) Journal of Scheduling , vol.14 , Issue.6 , pp. 583-599
    • Mnch, L.1    Fowler, J.W.2    Dauzre-Prs, S.3    Mason, S.J.4    Rose, O.5
  • 64
    • 33750718514 scopus 로고    scopus 로고
    • Genetic algorithm-based subproblem solution procedures for a modified shifting bottleneck heuristic for complex job shops
    • DOI 10.1016/j.ejor.2005.12.020, PII S0377221705008532
    • Mnch, L., Schabacker, R., Pabst, D., & Fowler, J. W. (2007). Genetic algorithmbased subproblem solution procedures for a modified shifting bottleneck heuristic for complex job shops. European Journal of Operational Research, 177(3), 2100-2118. (Pubitemid 44709466)
    • (2007) European Journal of Operational Research , vol.177 , Issue.3 , pp. 2100-2118
    • Monch, L.1    Schabacker, R.2    Pabst, D.3    Fowler, J.W.4
  • 65
    • 31744446040 scopus 로고    scopus 로고
    • Machine learning techniques for scheduling jobs with incompatible families and unequal ready times on parallel batch machines
    • DOI 10.1016/j.engappai.2005.10.001, PII S0952197605001259
    • Mnch, L., Zimmermann, J., & Otto, P. (2006). Machine learning techniques for scheduling jobs with incompatible families and unequal ready times on parallel batch machines. Engineering Applications of Artificial Intelligence, 19(3), 235-245. (Pubitemid 43177587)
    • (2006) Engineering Applications of Artificial Intelligence , vol.19 , Issue.3 , pp. 235-245
    • Monch, L.1    Zimmermann, J.2    Otto, P.3
  • 66
    • 85030491445 scopus 로고    scopus 로고
    • Nvidia
    • nvidia.com/cuda/nvidia-gpu-computing-documentation
    • Nvidia (2012). Nvidia CUDA Computing Documentation, http://developer. nvidia.com/cuda/nvidia-gpu-computing-documentation.
    • (2012) Nvidia CUDA Computing Documentation
  • 67
    • 38349091116 scopus 로고    scopus 로고
    • A multi-criteria approach for scheduling semiconductor wafer fabrication facilities
    • Pfund, M. E., Balasubramanian, H., Fowler, J. W., Mason, S. J., & Rose, O. (2008a). A multi-criteria approach for scheduling semiconductor wafer fabrication facilities. Journal of Scheduling, 11(1), 29-47.
    • (2008) Journal of Scheduling , vol.11 , Issue.1 , pp. 29-47
    • Pfund, M.E.1    Balasubramanian, H.2    Fowler, J.W.3    Mason, S.J.4    Rose, O.5
  • 68
    • 41449109607 scopus 로고    scopus 로고
    • Scheduling jobs on parallel machines with setup times and ready times
    • DOI 10.1016/j.cie.2007.08.011, PII S036083520700229X
    • Pfund, M., Fowler, J. W., Gadkari, A., & Chen, Y. (2008b). Scheduling jobs on parallel machines with setup times and ready times. Computers & Industrial Engineering, 54(4), 764-782. (Pubitemid 351458378)
    • (2008) Computers and Industrial Engineering , vol.54 , Issue.4 , pp. 764-782
    • Pfund, M.1    Fowler, J.W.2    Gadkari, A.3    Chen, Y.4
  • 71
    • 9444298969 scopus 로고    scopus 로고
    • Simplification strategies for simulation models of semiconductor facilities
    • Piplani, R., & Puah, S. A. (2004). Simplification strategies for simulation models of semiconductor facilities. Journal of Manufacturing Technology Management, 15(7), 618-625.
    • (2004) Journal of Manufacturing Technology Management , vol.15 , Issue.7 , pp. 618-625
    • Piplani, R.1    Puah, S.A.2
  • 73
    • 28644451407 scopus 로고    scopus 로고
    • Metaheuristic scheduling of 300-mm lots containing multiple orders
    • DOI 10.1109/TSM.2005.858503
    • Qu, P., & Mason, S. J. (2005). Metaheuristic scheduling of 300-mm lots containing multiple orders. IEEE Transactions on Semiconductor Manufacturing, 18(4), 633-643. (Pubitemid 41750312)
    • (2005) IEEE Transactions on Semiconductor Manufacturing , vol.18 , Issue.4 , pp. 633-643
    • Qu, P.1    Mason, S.J.2
  • 74
    • 18544381254 scopus 로고    scopus 로고
    • Informed operations: Speeding up geneticalgorithm- Based design optimization using reduced models
    • Rasheed, K., & Hirsh, H. (2000). Informed operations: speeding up geneticalgorithm- based design optimization using reduced models. In Genetic and evolutionary computation conference (pp. 628-635).
    • (2000) Genetic and Evolutionary Computation Conference , pp. 628-635
    • Rasheed, K.1    Hirsh, H.2
  • 78
    • 78650614174 scopus 로고    scopus 로고
    • A survey of dispatching rules for operational control in wafer fabrication
    • Sarin, S. C., Varadarajan, A., & Wang, L. (2011). A survey of dispatching rules for operational control in wafer fabrication. Production Planning & Control, 22(1), 4-24.
    • (2011) Production Planning & Control , vol.22 , Issue.1 , pp. 4-24
    • Sarin, S.C.1    Varadarajan, A.2    Wang, L.3
  • 81
    • 0142154261 scopus 로고    scopus 로고
    • A simulated annealing algorithm for integration of shop floor control strategies in semiconductor wafer fabrication
    • Sha, D. Y., & Liu, C. Y. (2003). A simulated annealing algorithm for integration of shop floor control strategies in semiconductor wafer fabrication. International Journal of Advanced Manufacturing Technology, 22(1-2), 75-88.
    • (2003) International Journal of Advanced Manufacturing Technology , vol.22 , Issue.1-2 , pp. 75-88
    • Sha, D.Y.1    Liu, C.Y.2
  • 83
    • 33744470862 scopus 로고    scopus 로고
    • Online multiobjective pareto optimal dynamic scheduling of semiconductor back-end using conjunctive simulated scheduling
    • DOI 10.1109/TEPM.2006.872703
    • Sivakumar, A. I., & Gupta, A. K. (2006). Online multiobjective Pareto optimal dynamic scheduling of semiconductor back-end using conjunctive simulated scheduling. IEEE Transactions on Electronics Packaging Manufacturing, 29(2), 99-109. (Pubitemid 43805549)
    • (2006) IEEE Transactions on Electronics Packaging Manufacturing , vol.29 , Issue.2 , pp. 99-109
    • Sivakumar, A.I.1    Gupta, A.M.2
  • 86
    • 33749553327 scopus 로고    scopus 로고
    • An ordinal optimization based evolution strategy to schedule complex make-to-order products
    • DOI 10.1080/00207540600620922, PII G622658463560434
    • Song, D. P., Hicks, C., & Earl, C. F. (2006). An ordinal optimization based evolution strategy to schedule complex make-to-order products. International Journal of Production Research, 44(22), 4877-4895. (Pubitemid 44536487)
    • (2006) International Journal of Production Research , vol.44 , Issue.22 , pp. 4877-4895
    • Song, D.-P.1    Hicks, C.2    Earl, C.F.3
  • 87
    • 40849124181 scopus 로고    scopus 로고
    • Control point policy optimization using genetic algorithms
    • DOI 10.1080/00207540601070119, PII 771146718
    • Stockton, D. J., Khalil, R., & Ardon-Finch, J. (2008). Control point policy optimization using genetic algorithms. International Journal of Production Research, 46(10), 2785-2795. (Pubitemid 351394252)
    • (2008) International Journal of Production Research , vol.46 , Issue.10 , pp. 2785-2795
    • Stockton, D.J.1    Khalil, R.2    Ardon-Finch, J.3
  • 88
    • 0142000477 scopus 로고    scopus 로고
    • Differential Evolution - A Simple and Efficient Heuristic for Global Optimization over Continuous Spaces
    • Storn, R., & Price, K. (1997). Differential evolution - a simple and efficient heuristic for global optimization over continuous spaces. Journal of Global Optimization, 11(4), 341-359. (Pubitemid 127502202)
    • (1997) Journal of Global Optimization , vol.11 , Issue.4 , pp. 341-359
    • Storn, R.1    Price, K.2
  • 90
    • 38849162891 scopus 로고    scopus 로고
    • Evolving dispatching rules using genetic programming for solving multi-objective flexible job-shop problems
    • DOI 10.1016/j.cie.2007.08.008, PII S0360835207002008
    • Tay, J. C., & Ho, N. B. (2008). Evolving dispatching rules using genetic programming for solving multi-objective flexible job-shop problems. Computers & Industrial Engineering, 54(3), 453-473. (Pubitemid 351199798)
    • (2008) Computers and Industrial Engineering , vol.54 , Issue.3 , pp. 453-473
    • Tay, J.C.1    Ho, N.B.2
  • 91
    • 33646742941 scopus 로고    scopus 로고
    • A problem reduction approach for scheduling semiconductor wafer fabrication facilities
    • Upasani, A. A., Uzsoy, R., & Sourirajan, K. (2006). A problem reduction approach for scheduling semiconductor wafer fabrication facilities. IEEE Transactions on Semiconductor Manufacturing, 19(2), 216-225.
    • (2006) IEEE Transactions on Semiconductor Manufacturing , vol.19 , Issue.2 , pp. 216-225
    • Upasani, A.A.1    Uzsoy, R.2    Sourirajan, K.3
  • 92
    • 0028496979 scopus 로고
    • A review of production planning and scheduling models in the semiconductor industry, Part II: Shop-floor control
    • Uzsoy, R., Lee, C.-Y., & Martin-Vega, L. A. (1994). A review of production planning and scheduling models in the semiconductor industry, Part II: Shop-floor control. IIE Transactions, 26(5), 44-55.
    • (1994) IIE Transactions , vol.26 , Issue.5 , pp. 44-55
    • Uzsoy, R.1    Lee, C.-Y.2    Martin-Vega, L.A.3
  • 93
    • 78049527141 scopus 로고    scopus 로고
    • A new dispatching rule based genetic algorithm for the multi-objective job shop problem
    • Vzquez-Rodrguez, J. A., & Petrovic, S. (2010). A new dispatching rule based genetic algorithm for the multi-objective job shop problem. Journal of Heuristics, 16(6), 771-793.
    • (2010) Journal of Heuristics , vol.16 , Issue.6 , pp. 771-793
    • Vzquez-Rodrguez, J.A.1    Petrovic, S.2
  • 94
    • 74549215615 scopus 로고    scopus 로고
    • Scheduling semiconductor in-line steppers in new product/process introduction scenarios
    • Wu, M. C., & Chiou, C. W. (2010). Scheduling semiconductor in-line steppers in new product/process introduction scenarios. International Journal of Production Research, 48(6), 1835-1852.
    • (2010) International Journal of Production Research , vol.48 , Issue.6 , pp. 1835-1852
    • Wu, M.C.1    Chiou, C.W.2
  • 95
    • 46149126445 scopus 로고    scopus 로고
    • Dispatching for make-to-order wafer fabs with machine-dedication and mask set-up characteristics
    • Wu, M. C., Chiou, S. J., & Chen, C. F. (2008). Dispatching for make-to-order wafer fabs with machine-dedication and mask set-up characteristics. International Journal of Production Research, 46(14), 3993-4009.
    • (2008) International Journal of Production Research , vol.46 , Issue.14 , pp. 3993-4009
    • Wu, M.C.1    Chiou, S.J.2    Chen, C.F.3
  • 97
    • 33750013118 scopus 로고    scopus 로고
    • A genetic algorithms simulation approach for the multi-attribute combinatorial dispatching decision problem
    • DOI 10.1016/j.ejor.2005.10.048, PII S0377221705008830
    • Yang, T., Kuo, Y., & Cho, C. (2007). A genetic algorithms simulation approach for the multi-attribute combinatorial dispatching decision problem. European Journal of Operational Research, 176(3), 1859-1873. (Pubitemid 44573675)
    • (2007) European Journal of Operational Research , vol.176 , Issue.3 , pp. 1859-1873
    • Yang, T.1    Kuo, Y.2    Cho, C.3
  • 98
    • 78651298060 scopus 로고    scopus 로고
    • A multi-objective dynamic scheduling approach using multiple attribute decision making in semiconductor manufacturing
    • Yao, S., Jiang, Z., Li, N., Zhang, H., & Geng, N. (2011). A multi-objective dynamic scheduling approach using multiple attribute decision making in semiconductor manufacturing. International Journal of Production Economics, 130(1), 125-133.
    • (2011) International Journal of Production Economics , vol.130 , Issue.1 , pp. 125-133
    • Yao, S.1    Jiang, Z.2    Li, N.3    Zhang, H.4    Geng, N.5
  • 99
    • 60949107906 scopus 로고    scopus 로고
    • Simulation-based optimization of dispatching rules for semiconductor wafer fabrication system scheduling by the response surface methodology
    • Zhang, H., Jiang, Z., & Guo, C. (2009a). Simulation-based optimization of dispatching rules for semiconductor wafer fabrication system scheduling by the response surface methodology. International Journal of Advanced Manufacturing Technology, 41(1-2), 110-121.
    • (2009) International Journal of Advanced Manufacturing Technology , vol.41 , Issue.1-2 , pp. 110-121
    • Zhang, H.1    Jiang, Z.2    Guo, C.3
  • 100
    • 70449625129 scopus 로고    scopus 로고
    • An optimized dynamic bottleneck dispatching policy for semiconductor wafer fabrication
    • Zhang, H., Jiang, Z., & Guo, C. (2009b). An optimized dynamic bottleneck dispatching policy for semiconductor wafer fabrication. International Journal of Production Research, 47(12), 3333-3343.
    • (2009) International Journal of Production Research , vol.47 , Issue.12 , pp. 3333-3343
    • Zhang, H.1    Jiang, Z.2    Guo, C.3


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