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Volumn 30, Issue 3, 2008, Pages 431-452

Heuristic algorithms to solve the capacity allocation problem in photolithography area (CAPPA)

(3) Chung, Shu Hsing a Huang, Chun Ying b Lee, Amy H I c

a NATIONAL CHIAO TUNG UNIVERSITY (Taiwan)

b CHING YUN UNIVERSITY (Taiwan)

c CHUNG HUA UNIVERSITY (Taiwan)

Author keywords

Heuristic; Linear programming; Machine dedication; Photolithography area; Process window

Indexed keywords

EID: 43449133276 PISSN: 01716468 EISSN: 14366304 Source Type: Journal
DOI: 10.1007/s00291-007-0093-4 Document Type: Article

Times cited : (12)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.