SCOPUS 정보 검색 플랫폼

Angewandte Chemie - International Edition

Volumn 54, Issue 50, 2015, Pages 15014-15021

Nanoscale Structuring of Surfaces by Using Atomic Layer Deposition

(2) Sobel, Nicolas a Hess, Christian a

a DARMSTADT UNIVERSITY OF TECHNOLOGY (Germany)

Author keywords

atomic layer deposition; nanoscale; porous materials; structuring; surface chemistry

Indexed keywords

ATOMS; CATALYSIS; DEPOSITION; FUEL CELLS; MICROELECTRONICS; NANOSTRUCTURED MATERIALS; NANOTECHNOLOGY; POROUS MATERIALS; SURFACE CHEMISTRY;

ALTERNATIVE ENERGY; HIGH SURFACE AREA; MICRO-ELECTRONIC DEVICES; NANO SCALE; NOVEL APPLICATIONS; PLANAR SUBSTRATE; POROUS SUBSTRATES; STRUCTURING;

ATOMIC LAYER DEPOSITION;

EID: 84955174928 PISSN: 14337851 EISSN: 15213773 Source Type: Journal
DOI: 10.1002/anie.201503680 Document Type: Review

Times cited : (36)

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