Benzocyclobutene/vinylphenyl-introduced polycarbosilanes with low dielectric constant, high temperature performance and photopatternability

Polymer

Volumn 66, Issue , 2015, Pages 58-66

  Hu, Huan ^a   Liu, Lili ^a   Li, Zheng ^a   Zhao, Cuijiao ^a   Huang, Yawen ^a   Chang, Guanjun ^a   Yang, Junxiao ^a  

^a SOUTHWEST UNIVERSITY OF SCIENCE AND TECHNOLOGY   (China)

Author keywords

Benzocyclobutene; Dielectric constant; Photopatternable

Indexed keywords

BUTENES; CHLORINE COMPOUNDS; CURING; DIELECTRIC MATERIALS; MICROELECTRONICS; PERMITTIVITY; PLATINUM COMPOUNDS; POLYSILANES;

BENZOCYCLOBUTENE; FT-IR CHARACTERIZATION; HIGH TEMPERATURE PERFORMANCE; LOW DIELECTRIC CONSTANTS; MICROELECTRONIC INDUSTRY; PHOTOPATTERNABLE; RING OPENING COPOLYMERIZATION; WEIGHT LOSS TEMPERATURES;

TEMPERATURE;

EID: 84928540019     PISSN: 00323861     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.polymer.2015.04.028     Document Type: Article

References (53)

1. G. Maier Prog Polym Sci 26 2001 3 65
2. W. Volksen, R.D. Miller, and G. Dubois Chem Rev 110 2009 56 110
3. J.S. Rathore, L.V. Interrante, and G. Dubois Adv Funct Mater 18 2008 4022 4028
4. B. Lee, Y.H. Park, Y.T. Hwang, W. Oh, J. Yoon, and M. Ree Nat Mater 4 2005 147 151
5. H.J. Lee, E.K. Lin, H. Wang, W. Chen, and E.S. Moyer Chem Mater 14 2002 1845 1852
6. G.D. Fu, Z.L. Yuan, E.T. Kang, K.G. Neoh, and D.M. Lai Adv Funct Mater 15 2005 315 322
7. T.L. Bucholz, S.P. Li, and Y.L. Loo J Mater Chem 18 2008 530 536
8. T.M. Long, and T.M. Swager J Am Chem Soc 125 2003 14113 14119
9. S.J. Martin, J.P. Godschalx, M.E. Mills, E.O. Shaffer, and P.H. Townsend Adv Mater 12 2000 1769 1778
10. Y.Y. Lyu, J.H. Yim, Y. Byun, J.M. Kim, and J.K. Jeon Thin Solid Films 496 2006 526 532
11. K. Tsuchiya, Y. Shibasaki, M. Aoyagi, and M. Ueda Macromolecules 39 2006 3964 3966
12. D.M. Lemal J Org Chem 69 2004 1 11
13. H. Behniafar, and S. Habibian Polym Int 54 2005 1134 1140
14. Y. Guan, D.M. Wang, G.L. Song, G.D. Dang, C.H. Chen, and H.W. Zhou Polymer 55 2014 3634 3641
15. J.X. Tong, S. Diao, K.K. Jin, C. Yuan, J.J. Wang, and J. Sun Polymer 55 16 2014 3628 3633
16. M. Ouaknine, I.J. Malik, M. Odera, T. Ishigaki, T. Ueda, and T. Fukada Microelectron Eng 74 2007 2646 2652
17. Y.R. Cheng, T.K. Qi, Y.X. Jin, D.Y. Deng, and F. Xiao Polymer 54 1 2013 143 147
18. K. Tsuchiya, H. Ishii, Y. Shibasaki, S. Ando, and M. Ueda Macromolecules 37 2004 4794 4797
19. B.Y. Liu, Y. Li, A.S. Mathews, Y.G. Wang, W.D. Yan, and S. Abraham React Funct Polym 68 2008 1619 1624
20. K. Ohba J Photopolym Sci Technol 15 2002 177 182
21. M. Hasegawa, and A. Tominaga J Photopolym Sci Technol 18 2005 307 312
22. Z.G. Qian, Z.Y. Ge, Z.X. Li, M.H. He, J.G. Liu, and Z.Z. Pang Polymer 43 2002 6057 6063
23. E. Murotani, J.K. Lee, M. Chatzichristidi, A.A. Eakidov, P.G. Taylor, and E.L. Schwartz ACS Appl Mater Interfaces 1 2009 2363 2370
24. Y. Jung, T.H. Yeo, and W. Yang J Phys Chem C 115 2011 25056 25062
25. J.H. Oh, S.Y. Kwak, S.C. Yang, and B.S. Bae ACS Appl Mater Interfaces 2 2010 913 918
26. P. Colombo, G. Mera, R. Riedel, and G.D. Soraru J Am Ceram Soc 93 2010 1805 1837
27. Z.Z. Wu, J.P. Papandrea, T. Apple, and L.V. Interrante Macromolecules 37 2004 5257 5264
28. M. Itoh, K. Inoue, K. Iwata, M. Mitsuzuka, and T. Kakigano Macromolecules 30 1997 694 701
29. M. Birot, J.P. Pillot, and J. Dunogues Chem Rev 95 1995 1443 1477
30. J. Hu, P.I. Carver, D.J. Meier, E.J. Stark, N. Xu, and T. Zhang Polymer 53 24 2012 5459 5468
31. J.L. Segura, and N. Martin Chem Rev 99 1999 3199 3246
32. A.K. Sadana, R.K. Saini, and W.E. Billups Chem Rev 103 2003 1539 1602
33. J.N. Dobish, S.K. Hamilton, and E. Harth Polym Chem 3 2012 857
34. F.K. He, C.L. Yuan, K.S. Diao, K.K. Jin, J.J. Wang, and J.W. Tong RSC Adv 3 2013 23128 23132
35. M.F. Farona Prog Polym Sci 21 1996 505 555
36. A. Modafe, N. Ghalichechian, and M. Powers Microelectron Eng 82 2005 154 167
37. X.B. Zuo, R.L. Yu, S. Shi, Z.H. Feng, Z.P. Li, and S.Y. Yang Polym Sci Part A Polym Chem 47 2009 6246 6258
38. X.Z. Zuo, X.J. Zhao, B. Liu, S.Y. Yang, and L. Fan J Appl Polym Sci 112 2009 2781 2791
39. J. Yang, Y.Y. Cheng, Y.X. Jin, and F. Xiao Polym Int 62 2013 1684 1691
40. X.B. Zuo, J.S. Chen, X.J. Zhao, S.Y. Yang, and L. Fan J Polym Sci Part A Polym Chem 46 2008 7868 7881
41. G. Sakellariou, D. Baskaran, N. Hadjichristidis, and J.W. Mays Macromolecules 39 2006 3525 3530
42. Y.H. So, S.F. Hahn, Y.F. Li, and M.T. Reinhard J Polym Sci Part A Polym Chem 46 2008 2799 2806
43. E. Harth, B.V. Horn, V.Y. Lee, D.S. Germack, C.P. Gonzales, and R.D. Miller J Am Chem Soc 124 2002 8653 8660
44. B.W. Ma, F. Lauterwasser, L. Deng, C.S. Zonte, B.J. Kim, and J.M. Frechet Chem Mater 19 2007 4827 4832
45. J.X. Yang, S.C. Liu, F.H. Zhu, Y.W. Huang, B. Li, and L. Zhang J Polym Sci Part A Polym Chem 49 2011 381 391
46. J.X. Yang, S.C. Liu, F.H. Zhu, Y.W. Huang, B. Li, and L. Zhang High Perform Polym 24 2012 112 118
47. L. Yang, K. Cao, Y.W. Huang, G.J. Chang, F.H. Zhu, and J.X. Yang High Perform Polym 26 2014 463 468
48. K. Cao, L. Yang, Y.W. Huang, G.J. Chang, and J.X. Yang Polymer 55 2014 5680 5688
49. J.F. Lloyd, and P.A. Ongley Tetrahedron 21 1965 245 254
50. J.W. Ryan, G.K. Menzie, and J.L. Speier J Am Chem Soc 82 1960 3601 3604
51. C. Unkelbach, and C. Strohmann J Am Chem Soc 131 2009 17044 17045
52. H. Ott, C. Daschlein, D. Leusser, D. Schildbach, T. Seibel, and D. Stalke J Am Chem Soc 130 2008 11901 11911
53. D.R. Weyenberg, and L.E. Nelson J Org Chem 30 1965 2618 2621