Environmentally friendly positive- and negative-tone photo-patterning systems of low-K and low-CTE polyimides

Journal of Photopolymer Science and Technology

Volumn 18, Issue 2, 2005, Pages 307-312

  Hasegawa, Masatoshi ^a   Tominaga, Azumi ^a  

^a TOHO UNIVERSITY   (Japan)

Author keywords

Environmentally friendly negative and positive type photo patterning; Low K and low CTE polyimides

Indexed keywords

EID: 22144480271     PISSN: 09149244     EISSN: None     Source Type: Journal    
DOI: 10.2494/photopolymer.18.307     Document Type: Article

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