Embedded benzocyclobutene in silicon: An integrated fabrication process for electrical and thermal isolation in MEMS

Microelectronic Engineering

Volumn 82, Issue 2, 2005, Pages 154-167

  Modafe, Alireza ^a   Ghalichechian, Nima ^a   Powers, Michael ^a   Khbeis, Michael ^a   Ghodssi, Reza ^a  

^a UNIVERSITY OF MARYLAND   (United States)

Author keywords

BCB; Benzocyclobutene; Electrical isolation; MEMS

Indexed keywords

AROMATIC POLYMERS; ATOMIC FORCE MICROSCOPY; BENZENE; CHEMICAL MECHANICAL POLISHING; PERMITTIVITY; REACTION INJECTION MOLDING; SCANNING ELECTRON MICROSCOPY; SUBSTRATES; THERMAL EFFECTS; THIN FILMS;

BENZOCYCLOBUTENE (BCB); ELECTRICAL ISOLATION; MEMS; MICROMOTORS;

SILICA;

EID: 25444525750     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2005.07.005     Document Type: Article

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