The achievement of a zinc oxide-based homojunction diode using radio frequency magnetron cosputtering system

Journal of Nanomaterials

Volumn 2015, Issue , 2015, Pages

  Chiu, Hung Jen ^a   Chen, Tai Hong ^b   Lai, Li Wen ^b   Lee, Ching Ting ^c   Hong, Jhen Dong ^a   Liu, Day Shan ^a  

^a NATIONAL FORMOSA UNIVERSITY   (Taiwan)

^b INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE   (Taiwan)

^c NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; CONTACT RESISTANCE; ELECTRIC CONTACTORS; ELECTRODES; ELECTRON SPECTROSCOPY; INDIUM; MAGNETRONS; METALLIC FILMS; OHMIC CONTACTS; RADIO WAVES; RAPID THERMAL ANNEALING; TIN OXIDES; ZINC;

AUGER ELECTRON SPECTROSCOPY DEPTH PROFILES; CURRENT-VOLTAGE MEASUREMENTS; DIODE CHARACTERISTICS; INTERFACIAL DIFFUSION; RADIO-FREQUENCY (RF) MAGNETRON; RADIO-FREQUENCY MAGNETRON CO-SPUTTERING; RAPID THERMAL ANNEALING (RTA); SPECIFIC CONTACT RESISTANCES;

ZINC OXIDE;

EID: 84928157635     PISSN: 16874110     EISSN: 16874129     Source Type: Journal    
DOI: 10.1155/2015/284835     Document Type: Article

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