Characterization of Pd/Ni/Au ohmic contacts on p-GaN

Solid-State Electronics

Volumn 49, Issue 5, 2005, Pages 774-778

  Cho, H K ^a   Hossain, T ^a   Bae, J W ^a   Adesida, I ^a  

^a University of Illinois at Urbana Champaign   (United States)

Author keywords

Contact resistance; GaN; Intermetallic compounds; Ni; Pd

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; CARRIER CONCENTRATION; DIFFUSION; ELECTRIC CONDUCTIVITY; GALLIUM NITRIDE; GOLD; INTERMETALLICS; METALLIZING; METALLORGANIC CHEMICAL VAPOR DEPOSITION; NICKEL; PALLADIUM; X RAY PHOTOELECTRON SPECTROSCOPY;

CONTACT RESISTANCE; INTERDIFFUSION; OHMIC CONTACT FORMATION; SURFACE REGIONS;

OHMIC CONTACTS;

EID: 14844289552     PISSN: 00381101     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sse.2005.01.020     Document Type: Conference Paper

References (22)

1. S. Nakamura, M. Senoh, S.I. Nagahama, T. Matsuhita, K. Kiyoki, and Y. Sugimoto Jpn J Appl Phys 35 1996 L74
2. S. Nakamura, M. Senoh, S. Nagahama, N Iwasa, T. Yamada, and T. Matsushita Jpn J Appl Phys, Part 2 38 1999 L1966
3. S.J. Pearton, J.C. Zolper, R.J. Shul, and F. Ren J Appl Phys 86 1999 1
4. J.T. Trexler, S.J. Pearton, P.H. Holloway, M.G. Mier, K.R. Evans, and R.F. Karlicek Mater Res Soc Symp Proc 449 1997 1091
5. J.K. Ho, C.S. Jong, C.C. Chiu, C.N. Huang, and K.K. Shih Appl Phys Lett 74 1999 1275
6. Y. Koide, T. Maeda, T. Kawakami, S. Fujita, T. Uemura, and N. Shibata J Electron Mater 28 1999 341
7. D.J. King, L. Zhang, J.C. Ramer, S.D. Hersee, and L.F. Lester Mater. Res. Soc. Symp. Proc. 468 1997 421
8. J.K. Kim, J.L. Lee, J.W. Lee, H.E. Shin, Y.J. Park, and T. Kim Appl Phys Lett 73 1998 2953
9. J.S. Jang, I.-S. Chang, H.-K. Kim, T.-Y. Seong, S. Lee, and S.J. Park Appl Phys Lett 74 1999 70
10. T. Kim, J. Kim, S. Chae, and T. Kim Mater. Res. Soc. Symp. Proc. 449 1997 1061
11. C-F. Chu, C.C. Yu, Y.W. Wang, J.Y. Tsai, F.I. Lai, and S.C. Wang Appl Phys Lett 77 2000 3423
12. E.F. Chor, D. Zhang, H. Gong, G.L. Chen, and T.Y.F. Liew J Appl Phys 90 2001 1242
13. L. Chen, F. Chen, J. Kai, L. Chang, J. Ho, and C. Jong J Appl Phys 86 1999 3826
14. K.V. Vassilevski, M.G. Rastegaeva, A.I. Babanin, I.P. Nikitina, and V.A. Dimitriev MRS Internet J Nitride Semicond Rec 1 1998 38
15. J. Mumont, E. Monroy, E. Munoz, R. Caudano, and R. Sporken J Crystal Growth 230 2001 558
16. J.K. Kim, H.W. Jang, C.C. Kim, J.H. Je, K.A. Rickert, and T.F. Kuech J Vac Sci Technol B 21 2003 87
17. F.U. Hillebrecht, J.C. Fuggle, P.A. Bennett, and Z. Zolnierek Phys Rev B 27 1983 2179
18. A.R. Williams, and N.O. Lang Phys Rev Lett 40 1978 954
19. J.F. Moulder W.F. Stickle P.E. Sobol K.D. Bomen Handbook of X-ray photoelectron spectroscopy 1995 Physical Electronics, Inc.
20. M.E. Lin, F.Y. Haung, and H. Morkoc Appl Phys Lett 64 1994 2557
21. H.W. Jang, K.H. Kim, J.K. Kim, S.-W. Hwang, J.J. Yang, and K.J. Lee Appl Phys Lett 79 2001 1822
22. J.-S. Jang, S.-J. Park, and T.-Y. Seong J Electrochem Soc 146 1999 3425