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Volumn 23, Issue 2, 2015, Pages 1428-1437

Tailored surface birefringence by femtosecond laser assisted wet etching

Author keywords

[No Author keywords available]

Indexed keywords

BIREFRINGENCE; COLOR CENTERS; GLASS; POTASSIUM HYDROXIDE; ULTRAFAST LASERS; ULTRASHORT PULSES;

EID: 84921709505     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.23.001428     Document Type: Article
Times cited : (29)

References (37)
  • 1
    • 41549088314 scopus 로고    scopus 로고
    • Femtosecond laser micromachining in transparent materials
    • R. R. Gattass and E. Mazur, "Femtosecond laser micromachining in transparent materials," Nat. Photonics 2(4), 219-225 (2008).
    • (2008) Nat. Photonics , vol.2 , Issue.4 , pp. 219-225
    • Gattass, R.R.1    Mazur, E.2
  • 2
    • 0942289993 scopus 로고    scopus 로고
    • Self-organized nanogratings in glass irradiated by ultrashort light pulses
    • Y. Shimotsuma, P. G. Kazansky, J. Qiu, and K. Hirao, "Self-organized nanogratings in glass irradiated by ultrashort light pulses," Phys. Rev. Lett. 91(24), 247405 (2003).
    • (2003) Phys. Rev. Lett , vol.91 , Issue.24 , pp. 247405
    • Shimotsuma, Y.1    Kazansky, P.G.2    Qiu, J.3    Hirao, K.4
  • 3
    • 42949141630 scopus 로고    scopus 로고
    • Applications of femtosecond laser induced self-organized planar nanocracks inside fused silica glass
    • R. Taylor, C. Hnatovsky, and E. Simova, "Applications of femtosecond laser induced self-organized planar nanocracks inside fused silica glass," Laser Photon. Rev. 2(1-2), 26-46 (2008).
    • (2008) Laser Photon. Rev , vol.2 , Issue.1-2 , pp. 26-46
    • Taylor, R.1    Hnatovsky, C.2    Simova, E.3
  • 5
    • 84889061058 scopus 로고    scopus 로고
    • Transformations induced in bulk amorphous silica by ultrafast laser direct writing
    • V. Oliveira, S. P. Sharma, P. Herrero, and R. Vilar, "Transformations induced in bulk amorphous silica by ultrafast laser direct writing," Opt. Lett. 38(23), 4950-4953 (2013).
    • (2013) Opt. Lett , vol.38 , Issue.23 , pp. 4950-4953
    • Oliveira, V.1    Sharma, S.P.2    Herrero, P.3    Vilar, R.4
  • 6
    • 84859337898 scopus 로고    scopus 로고
    • Polarization sensitive elements fabricated by femtosecond laser nanostructuring of glass
    • M. Beresna, M. Gecevičius, and P. G. Kazansky, "Polarization sensitive elements fabricated by femtosecond laser nanostructuring of glass," Opt. Mater. Express 1(4), 783-795 (2011).
    • (2011) Opt. Mater. Express , vol.1 , Issue.4 , pp. 783-795
    • Beresna, M.1    Gecevičius, M.2    Kazansky, P.G.3
  • 7
    • 84894472612 scopus 로고    scopus 로고
    • Seemingly unlimited lifetime data storage in nanostructured glass
    • J. Zhang, M. Gecevičius, M. Beresna, and P. G. Kazansky, "Seemingly unlimited lifetime data storage in nanostructured glass," Phys. Rev. Lett. 112(3), 033901 (2014).
    • (2014) Phys. Rev. Lett , vol.112 , Issue.3 , pp. 033901
    • Zhang, J.1    Gecevičius, M.2    Beresna, M.3    Kazansky, P.G.4
  • 9
    • 2942731788 scopus 로고    scopus 로고
    • Fabrication of high-aspect ratio, micro-fluidic channels and tunnels using femtosecond laser pulses and chemical etching
    • Y. Bellouard, A. Said, M. Dugan, and P. Bado, "Fabrication of high-aspect ratio, micro-fluidic channels and tunnels using femtosecond laser pulses and chemical etching," Opt. Express 12(10), 2120-2129 (2004).
    • (2004) Opt. Express , vol.12 , Issue.10 , pp. 2120-2129
    • Bellouard, Y.1    Said, A.2    Dugan, M.3    Bado, P.4
  • 12
    • 77649274436 scopus 로고    scopus 로고
    • Nano-and microstructuring of SiO2 and sapphire with fs-laser induced selective etching
    • M. Hörstmann-Jungemann, J. Gottmann, and D. Wortmann, "Nano-and microstructuring of SiO2 and sapphire with fs-laser induced selective etching," J. Laser Micro/Nanoeng. 4, 135-140 (2009).
    • (2009) J. Laser Micro/Nanoeng , vol.4 , pp. 135-140
    • Hörstmann-Jungemann, M.1    Gottmann, J.2    Wortmann, D.3
  • 13
    • 84872011497 scopus 로고    scopus 로고
    • Micromanufacturing in fused silica via femtosecond laser irradiation followed by gas-phase chemical etching
    • F. Venturini, M. Sansotera, R. M. Vazquez, R. Osellame, G. Cerullo, and W. Navarrini, "Micromanufacturing in fused silica via femtosecond laser irradiation followed by gas-phase chemical etching," Micromachines 3(4), 604-614 (2012).
    • (2012) Micromachines , vol.3 , Issue.4 , pp. 604-614
    • Venturini, F.1    Sansotera, M.2    Vazquez, R.M.3    Osellame, R.4    Cerullo, G.5    Navarrini, W.6
  • 14
    • 84874548300 scopus 로고    scopus 로고
    • Femtosecond versus picosecond laser machining of nano-gratings and micro-channels in silica glass
    • C. Corbari, A. Champion, M. Gecevičius, M. Beresna, Y. Bellouard, and P. G. Kazansky, "Femtosecond versus picosecond laser machining of nano-gratings and micro-channels in silica glass," Opt. Express 21(4), 3946-3958 (2013).
    • (2013) Opt. Express , vol.21 , Issue.4 , pp. 3946-3958
    • Corbari, C.1    Champion, A.2    Gecevičius, M.3    Beresna, M.4    Bellouard, Y.5    Kazansky, P.G.6
  • 15
    • 23144464899 scopus 로고    scopus 로고
    • Polarizationselective etching in femtosecond laser-assisted microfluidic channel fabrication in fused silica
    • C. Hnatovsky, R. S. Taylor, E. Simova, V. R. Bhardwaj, D. M. Rayner, and P. B. Corkum, "Polarizationselective etching in femtosecond laser-assisted microfluidic channel fabrication in fused silica," Opt. Lett. 30(14), 1867-1869 (2005).
    • (2005) Opt. Lett , vol.30 , Issue.14 , pp. 1867-1869
    • Hnatovsky, C.1    Taylor, R.S.2    Simova, E.3    Bhardwaj, V.R.4    Rayner, D.M.5    Corkum, P.B.6
  • 16
    • 24144454786 scopus 로고    scopus 로고
    • Integrating optics and micro-mechanics in a single substrate: A step toward monolithic integration in fused silica
    • Y. Bellouard, A. Said, and P. Bado, "Integrating optics and micro-mechanics in a single substrate: a step toward monolithic integration in fused silica," Opt. Express 13(17), 6635-6644 (2005).
    • (2005) Opt. Express , vol.13 , Issue.17 , pp. 6635-6644
    • Bellouard, Y.1    Said, A.2    Bado, P.3
  • 17
    • 42149194362 scopus 로고    scopus 로고
    • Nano-aquarium for dynamic observation of living cells fabricated by femtosecond laser direct writing of photostructurable glass
    • Y. Hanada, K. Sugioka, H. Kawano, I. S. Ishikawa, A. Miyawaki, and K. Midorikawa, "Nano-aquarium for dynamic observation of living cells fabricated by femtosecond laser direct writing of photostructurable glass," Biomed. Microdevices 10(3), 403-410 (2008).
    • (2008) Biomed. Microdevices , vol.10 , Issue.3 , pp. 403-410
    • Hanada, Y.1    Sugioka, K.2    Kawano, H.3    Ishikawa, I.S.4    Miyawaki, A.5    Midorikawa, K.6
  • 18
    • 70349345896 scopus 로고    scopus 로고
    • Three-dimensional microfabrication of materials by femtosecond lasers for photonics applications
    • S. Juodkazis, V. Mizeikis, and H. Misawa, "Three-dimensional microfabrication of materials by femtosecond lasers for photonics applications," J. Appl. Phys. 106(5), 051101 (2009).
    • (2009) J. Appl. Phys , vol.106 , Issue.5 , pp. 051101
    • Juodkazis, S.1    Mizeikis, V.2    Misawa, H.3
  • 19
    • 84862095001 scopus 로고    scopus 로고
    • Femtosecond laser-assisted etching of three-dimensional inverted-woodpile structures in fused silica
    • S. Ho, M. Haque, P. R. Herman, and J. S. Aitchison, "Femtosecond laser-assisted etching of three-dimensional inverted-woodpile structures in fused silica," Opt. Lett. 37(10), 1682-1684 (2012).
    • (2012) Opt. Lett , vol.37 , Issue.10 , pp. 1682-1684
    • Ho, S.1    Haque, M.2    Herman, P.R.3    Aitchison, J.S.4
  • 20
    • 56749098349 scopus 로고    scopus 로고
    • Scanning thermal microscopy and Raman analysis of bulk fused silica exposed to low-energy femtosecond laser pulses
    • Y. Bellouard, E. Barthel, A. A. Said, M. Dugan, and P. Bado, "Scanning thermal microscopy and Raman analysis of bulk fused silica exposed to low-energy femtosecond laser pulses," Opt. Express 16(24), 19520-19534 (2008).
    • (2008) Opt. Express , vol.16 , Issue.24 , pp. 19520-19534
    • Bellouard, Y.1    Barthel, E.2    Said, A.A.3    Dugan, M.4    Bado, P.5
  • 21
    • 77958007403 scopus 로고    scopus 로고
    • Towards fast femtosecond laser micromachining of fused silica: The effect of deposited energy
    • S. Rajesh and Y. Bellouard, "Towards fast femtosecond laser micromachining of fused silica: The effect of deposited energy," Opt. Express 18(20), 21490-21497 (2010).
    • (2010) Opt. Express , vol.18 , Issue.20 , pp. 21490-21497
    • Rajesh, S.1    Bellouard, Y.2
  • 22
    • 70449637854 scopus 로고    scopus 로고
    • Femtosecond laser-assisted formation of channels in sapphire using KOH solution
    • S. Juodkazis, Y. Nishi, and H. Misawa, ""Femtosecond laser-assisted formation of channels in sapphire using KOH solution," Phys," Status Solidi-R 2(6), 275-277 (2008).
    • (2008) Phys," Status Solidi-R , vol.2 , Issue.6 , pp. 275-277
    • Juodkazis, S.1    Nishi, Y.2    Misawa, H.3
  • 23
    • 67650809740 scopus 로고    scopus 로고
    • Examination of etching agent and etching mechanism on femotosecond laser microfabrication of channels inside vitreous silica substrates
    • S. Kiyama, S. Matsuo, S. Hashimoto, and Y. Morihira, "Examination of etching agent and etching mechanism on femotosecond laser microfabrication of channels inside vitreous silica substrates," J. Phys. Chem. C 113(27), 11560-11566 (2009).
    • (2009) J. Phys. Chem. C , vol.113 , Issue.27 , pp. 11560-11566
    • Kiyama, S.1    Matsuo, S.2    Hashimoto, S.3    Morihira, Y.4
  • 24
    • 84881136883 scopus 로고    scopus 로고
    • Hybrid chemical etching of femtosecond laser irradiated structures for engineered microfluidic devices
    • S. LoTurco, R. Osellame, R. Ramponi, and K. C. Vishnubhatla, "Hybrid chemical etching of femtosecond laser irradiated structures for engineered microfluidic devices," J. Micromech. Microeng. 23(8), 085002 (2013).
    • (2013) J. Micromech. Microeng , vol.23 , Issue.8 , pp. 085002
    • Loturco, S.1    Osellame, R.2    Ramponi, R.3    Vishnubhatla, K.C.4
  • 25
    • 84903199494 scopus 로고    scopus 로고
    • Selective, laser-induced etching of fused silica at high scan-speeds using KOH
    • M. Hermans, J. Gottmann, and F. Riedel, "Selective, laser-induced etching of fused silica at high scan-speeds using KOH," J. Laser Micro/Nanoeng. 9, 126-131 (2014).
    • (2014) J. Laser Micro/Nanoeng , vol.9 , pp. 126-131
    • Hermans, M.1    Gottmann, J.2    Riedel, F.3
  • 26
    • 84885001666 scopus 로고    scopus 로고
    • Broadband anisotropy of femtosecond laser induced nanogratings in fused silica
    • M. Beresna, M. Gecevičius, M. Lancry, B. Poumellec, and P. G. Kazansky, "Broadband anisotropy of femtosecond laser induced nanogratings in fused silica," Appl. Phys. Lett. 103(13), 131903 (2013).
    • (2013) Appl. Phys. Lett , vol.103 , Issue.13 , pp. 131903
    • Beresna, M.1    Gecevičius, M.2    Lancry, M.3    Poumellec, B.4    Kazansky, P.G.5
  • 28
    • 84886428992 scopus 로고    scopus 로고
    • Stress distribution around femtosecond laser affected zones: Effect of nanogratings orientation
    • A. Champion, M. Beresna, P. Kazansky, and Y. Bellouard, "Stress distribution around femtosecond laser affected zones: effect of nanogratings orientation," Opt. Express 21(21), 24942-24951 (2013).
    • (2013) Opt. Express , vol.21 , Issue.21 , pp. 24942-24951
    • Champion, A.1    Beresna, M.2    Kazansky, P.3    Bellouard, Y.4
  • 29
    • 48249143984 scopus 로고    scopus 로고
    • Kinetics of amorphous silica dissolution and the paradox of the silica polymorphs
    • P. M. Dove, N. Han, A. F. Wallace, and J. J. De Yoreo, "Kinetics of amorphous silica dissolution and the paradox of the silica polymorphs," Proc. Natl. Acad. Sci. U.S.A. 105(29), 9903-9908 (2008).
    • (2008) Proc. Natl. Acad. Sci. U.S.A , vol.105 , Issue.29 , pp. 9903-9908
    • Dove, P.M.1    Han, N.2    Wallace, A.F.3    De Yoreo, J.J.4
  • 30
    • 0027519020 scopus 로고
    • Quartz dissolution : Theory of rough and smooth surfaces
    • J. Gratz and P. Bird, "Quartz dissolution : theory of rough and smooth surfaces," Geochim. Cosmochim. Acta 57(5), 977-989 (1993).
    • (1993) Geochim. Cosmochim. Acta , vol.57 , Issue.5 , pp. 977-989
    • Gratz, J.1    Bird, P.2
  • 31
    • 0032183115 scopus 로고    scopus 로고
    • Optically active oxygen-deficiency-related centers in amorphous silicon dioxide
    • L. Skuja, "Optically active oxygen-deficiency-related centers in amorphous silicon dioxide," J. Non-Cryst. Solids 239(1-3), 16-48 (1998).
    • (1998) J. Non-Cryst. Solids , vol.239 , Issue.1-3 , pp. 16-48
    • Skuja, L.1
  • 32
    • 0025521074 scopus 로고
    • Anisotropic etching of crystalline silicon in alkaline solutions
    • H. Seidel, L. Csepregi, A. Heuberger, and H. Boumgortel, "Anisotropic etching of crystalline silicon in alkaline solutions," J. Electrochem. Soc. 137(11), 3612-3626 (1990).
    • (1990) J. Electrochem. Soc , vol.137 , Issue.11 , pp. 3612-3626
    • Seidel, H.1    Csepregi, L.2    Heuberger, A.3    Boumgortel, H.4
  • 35
    • 0000392505 scopus 로고    scopus 로고
    • Achromatic quarter-wave plates using the dispersion of form birefringence
    • H. Kikuta, Y. Ohira, and K. Iwata, "Achromatic quarter-wave plates using the dispersion of form birefringence," Appl. Opt. 36(7), 1566-1572 (1997).
    • (1997) Appl. Opt , vol.36 , Issue.7 , pp. 1566-1572
    • Kikuta, H.1    Ohira, Y.2    Iwata, K.3
  • 36
    • 84886057997 scopus 로고    scopus 로고
    • Polarization sensitive camera by femtosecond laser nanostructuring
    • M. Gecevičius, M. Beresna, and P. G. Kazansky, "Polarization sensitive camera by femtosecond laser nanostructuring," Opt. Lett. 38(20), 4096-4099 (2013).
    • (2013) Opt. Lett , vol.38 , Issue.20 , pp. 4096-4099
    • Gecevičius, M.1    Beresna, M.2    Kazansky, P.G.3
  • 37
    • 84892992034 scopus 로고    scopus 로고
    • Flat optics with designer metasurfaces
    • N. Yu and F. Capasso, "Flat optics with designer metasurfaces," Nat. Mater. 13(2), 139-150 (2014).
    • (2014) Nat. Mater , vol.13 , Issue.2 , pp. 139-150
    • Yu, N.1    Capasso, F.2


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