Femtosecond laser-assisted etching of three-dimensional inverted-woodpile structures in fused silica

Optics Letters

Volumn 37, Issue 10, 2012, Pages 1682-1684

  Ho, Stephen ^a   Haque, Moez ^a   Herman, Peter R ^a   Aitchison, J Stewart ^a  

^a UNIVERSITY OF TORONTO   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL ETCHING; CRACK FREE; DEPTH DEPENDENTS; DILUTED HYDROFLUORIC ACIDS; ELECTROOSMOTIC PUMPS; ETCHING RATE; FEMTOSECONDS; HOLE SIZE; LASER EXPOSURE; LASER SCANNING; LASER-ASSISTED ETCHING; MICRO FLUIDIC SYSTEM; MICROCAPILLARY ARRAYS; OPTICAL BEAMS; PULSE ENERGIES; SILICA SUBSTRATE;

BIOCOMPATIBILITY; CHROMATOGRAPHY; ETCHING; THREE DIMENSIONAL; ULTRASHORT PULSES;

MICROCHANNELS;

EID: 84862095001     PISSN: 01469592     EISSN: 15394794     Source Type: Journal    
DOI: 10.1364/OL.37.001682     Document Type: Article

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