Hybrid chemical etching of femtosecond laser irradiated structures for engineered microfluidic devices

Journal of Micromechanics and Microengineering

Volumn 23, Issue 8, 2013, Pages

  Loturco, S ^a,b   Osellame, R ^c   Ramponi, R ^a,b,c   Vishnubhatla, K C ^a  

^a ISTITUTO ITALIANO DI TECNOLOGIA   (Italy)

^b POLITECNICO DI MILANO   (Italy)

^c CNR   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL ETCHING; COMPLEX GEOMETRIES; HIGH SELECTIVITY; IRRADIATED STRUCTURES; IRRADIATED ZONES; MICRO-FLUIDIC DEVICES; MICROFLUIDIC STRUCTURES; POTASSIUM HYDROXIDE SOLUTION;

FLUIDIC DEVICES; HYDROFLUORIC ACID; ULTRASHORT PULSES;

ETCHING;

EID: 84881136883     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/23/8/085002     Document Type: Article

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