Fabrication of microchannels in glass using focused femtosecond laser radiation and selective chemical etching

Applied Physics A: Materials Science and Processing

Volumn 84, Issue 1-2, 2006, Pages 47-61

  Hnatovsky, C ^a   Taylor, R S ^a   Simova, E ^a   Rajeev, P P ^a   Rayner, D M ^a   Bhardwaj, V R ^b   Corkum, P B ^a  

^a NATIONAL RESEARCH COUNCIL CANADA   (Canada)

^b UNIVERSITY OF OTTAWA   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL MODIFICATION; ETCHING; LASER APPLICATIONS; MORPHOLOGY; SCANNING ELECTRON MICROSCOPY;

CHEMICAL ETCHING; LASER RADIATION; MICROCHANNELS;

GLASS;

EID: 33646690775     PISSN: 09478396     EISSN: 14320630     Source Type: Journal    
DOI: 10.1007/s00339-006-3590-4     Document Type: Article

References (44)

1. A. Manz, H. Becker (Eds.), Microsystem Technology in Chemistry and life Sciences (Springer, New York, 1998)
2. G.T.A. Kovac, Micromachined Transducers Source Book (McGraw Hill, New York, 1998)
3. K.M. Davis, K. Miura, N. Sugimoto, K. Hirao, Opt. Lett. 21, 1729 (1996)
4. K. Miura, J. Qiu, H. Inouye, T. Mitsuyu, K. Hirao, Appl. Phys. Lett. 71, 3329 (1997)
5. D. Homoelle, S. Wielandy, A.L. Gaeta, N.F. Borelli, C. Smith, Opt. Lett. 24, 1311 (1999)
6. V.R. Bhardwaj, E. Simova, P.B. Corkum, D.M. Rayner, C. Hnatovsky, R.S. Taylor, B. Schreder, M. Kluge, J. Zimmer, J. Appl. Phys. 97, 83 102-1-9 (2005)
7. M.S. Giridhar, K. Seong, A. Schülzgen, P. Khulbe, N. Peyghambarian, M. Mansuripur, Appl. Opt. 43, 4584 (2004)
8. H. Varel, D. Ashkenasi, A. Rosenfeld, M. Wähmer, E.E.B. Campbell, Appl. Phys. A 65, 367 (1997)
9. L. Shah, J. Tawny, M. Richardson, K. Richardson, Appl. Surf. Sci. 183, 151 (2001)
10. Y. Li, K. Itoh, W. Watanabe, K. Yamada, D. Kuroda, J. Nishii, Y. Jiang, Opt. Lett. 26, 1912 (2001)
11. D.J. Hwang, T.Y. Choi, C.P. Grigoropoulos, Appl. Phys. A 79, 605 (2004)
12. Y. Kondo, J. Qiu, T. Mitsuyu, K. Hirao, T. Yoko, Jpn. J. Appl. Phys. 38, L1146 (1999)
13. K. Sugioka, Y. Cheng, K. Midorikawa, Appl. Phys. A 81, 1 (2005)
14. A. Marcinkevièius, S. Juodkazis, M. Watanabe, M. Miwa, S. Matsuo, H. Misawa, J. Nishii, Opt. Lett. 26, 277 (2001)
15. Y. Bellouard, A. Said, M. Dugan, P. Bado, Opt. Express 12, 2120 (2004)
16. C. Hnalovsky, R.S. Taylor, E. Simova, V.R. Bhardwaj, D.M. Rayner, P.B. Corkum, Opt. Lett. 30, 1867 (2005)
17. R.S. Taylor, C. Hnatovsky, E. Simova, D.M. Rayner, M. Mehendale, V.R. Bhardwaj, P.B. Corkum, Opt. Express 11, 775 (2003)
18. L. Sudrie, M. Franco, B. Prade, A. Mysyrowicz, Opt. Commun. 191, 333 (2001)
19. Y. Shimotsuma, P.G. Kazansky, J. Qiu, K. Hirao, Phys. Rev. Lett. 91, 247 405 (2003)
20. E.N. Glezer, M. Milosavljevic, L. Huang, R.J. Finlay, T.-H. Her, J.P. Callan, E. Mazur, Opt. Lett. 21, 2023 (1996)
21. C. Hnatovsky, R.S. Taylor, P.P. Rajeev, E. Simova, V.R. Bhardwaj, D.M. Rayner, P.B. Corkum, Appl. Phys. Lett. 87, 014 104-1-3 (2005)
22. R.S. Taylor, C. Hnatovsky, E. Simova, D.M. Rayner, V.R. Bhardwaj, P.B. Corkum, Opt. Lett. 28, 1043 (2003)
23. B.A.F. Puygranier, P. Dawson, Ultramicroscopy 85, 235 (2000)
24. C. Hnatovsky, R.S. Taylor, E. Simova, V.R. Bhardwaj, D.M. Rayner, P.B. Corkum, J. Appl. Phys. 98, 13517-1-5 (2005)
25. P. Török, P. Varga, Z. Laczik, G.R. Booker, J. Opt. Soc. Am. A 12, 325 (1995)
26. S.H. Wiersma, P. Török, T.D. Visser, P. Varga, J. Opt. Soc. Am. A 14, 1482 (1997)
27. C.B. Shaffer, A. Brodeur, E. Mazur, Meas. Sci. Technol. 12, 1784 (2001)
28. D.M. Rayner, A. Naumov, P. Corkum, Opt. Express 13, 3208 (2005)
29. A. Marcinkevièius, V. Mizeikis, S. Juodkazis, S. Matsuo, H. Mizawa, Appl. Phys. A 76, 257 (2003)
30. G.A.C.M. Spierings, J. Mater. Sci. 28, 6261 (1993)
31. M.B. Stern, M.W. Geis, J.E. Curtin, J. Vac. Sci. Technol. B 15, 2887 (1997)
32. Z. Guosheng, P.M. Fauchet, A.E. Siegman, Phys. Rev. B 26, 5366 (1982)
33. J.E. Sipe, J.F. Young, J.S. Preston, H.M. van Driel, Phys. Rev. B 27, 1141 (1983)
34. A. Barborica, I.N. Mihailescu, V.S. Teodorescu, Phys. Rev. B 49, 8385 (1994)
35. R. Wagner, J. Gottmann, A. Horn, E.W. Kreutz, Proc. SPIE 5662, 168 (2004)
36. V.R. Bhardwaj, E. Simova, P.P. Rajeev, C. Hnatovsky, R.S. Taylor, D.M. Rayner, P.B. Corkum, Phys. Rev. Eett. 96, 057 404 (2006)
37. L.N. Gaier, M. Lein, M.I. Stockman, P.L. Knight, P.B. Corkum, M.Y. Ivanov, G.L. Yudin, J. Phys. B 37, E57 (2004)
38. E. Bricchi, W. Yang, P. Kazansky, Robustness of Femtosecond Direct Written Structures in Silica Glass, presented at Conf. Lasers and Electro-Optics, Baltimore, MA, May 22-27 (2005)
39. C.B. Schaffer, J.E. Garcia, E. Mazur, Appl. Phys. A 76, 351 (2003)
40. S.M. Eaton, H. Zhang, P. Herman, F. Yoshino, E. Shah, J. Bovatsek, A.Y. Arai, Opt. Express 13, 4708 (2005)
41. J. Amako, D. Sawaki, E. Fujii, J. Opt. Soc. Am. B 20, 2562 (2003)
42. J.E. Vossen, W. Kern (Eds.). Thin Film Processes (Academic Press, Orlando, 1978), Part V Etching Processes, p. 401
43. J. Han, H.G. Craighead, Science 288, 1026 (2000)
44. Y. Shimotsuma, K. Hirao, J. Qiu, P.G. Kazansky, Mod. Phys. Lett. B 19, 225 (2005)