메뉴 건너뛰기




Volumn 134, Issue , 2015, Pages 298-304

Nitric acid oxidation of Si method for improvement of crystalline Si solar cell characteristics by surface passivation effect

Author keywords

NAOS; Nitric acid; Passivation; Silicon; Silicon nitride; Solar cell

Indexed keywords

CARRIER LIFETIME; CRYSTALLINE MATERIALS; INTERFACE STATES; NITRIC ACID; NITRIDES; PASSIVATION; PLASMA APPLICATIONS; SILICON NITRIDE; SILICON OXIDES; SILICON SOLAR CELLS; SOLAR CELLS;

EID: 84921403299     PISSN: 09270248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.solmat.2014.11.040     Document Type: Article
Times cited : (20)

References (46)
  • 1
    • 0000943087 scopus 로고    scopus 로고
    • Optical and electronic properties of Si nanoclusters synthesized in inverse micelles
    • J.P. Wilcoxon, G.A. Samara, and P.N. Provencio Optical and electronic properties of Si nanoclusters synthesized in inverse micelles Phys. Rev. B 60 1999 2704 2714
    • (1999) Phys. Rev. B , vol.60 , pp. 2704-2714
    • Wilcoxon, J.P.1    Samara, G.A.2    Provencio, P.N.3
  • 3
    • 0015481573 scopus 로고
    • Characterization of thin-oxide MNOS memory transistors
    • M.H. White, and J.R. Cricchi Characterization of thin-oxide MNOS memory transistors IEEE T. Electron Dev. 19 1972 1280 1288
    • (1972) IEEE T. Electron Dev. , vol.19 , pp. 1280-1288
    • White, M.H.1    Cricchi, J.R.2
  • 7
    • 0034268858 scopus 로고    scopus 로고
    • Surface passivation of crystalline silicon solar cells
    • A. Aberle Surface passivation of crystalline silicon solar cells Prog. Photovoltaics 8 2000 473 487
    • (2000) Prog. Photovoltaics , vol.8 , pp. 473-487
    • Aberle, A.1
  • 8
    • 0017456928 scopus 로고
    • Annealing of surface states in polycrystalline-silicon-gate capacitors
    • T.W. Hickmott Annealing of surface states in polycrystalline-silicon-gate capacitors J. Appl. Phys. 48 1977 723 733
    • (1977) J. Appl. Phys. , vol.48 , pp. 723-733
    • Hickmott, T.W.1
  • 9
    • 0037570641 scopus 로고
    • 2 on Si: An ion-beam study
    • 2 on Si: an ion-beam study J. Appl. Phys. 61 1987 5428 5437
    • (1987) J. Appl. Phys. , vol.61 , pp. 5428-5437
    • Myer, S.M.1
  • 10
    • 36449002905 scopus 로고    scopus 로고
    • Recrd low surface recombination velocities on 1 cm psillicon using remote plasma silicon nitride passivation
    • T. Lauinger, J. Schmidt, A.G. Aberie, and R. Hezel Recrd low surface recombination velocities on 1 cm psillicon using remote plasma silicon nitride passivation Appl. Phys. Lett. 68 1996 1232 1234
    • (1996) Appl. Phys. Lett. , vol.68 , pp. 1232-1234
    • Lauinger, T.1    Schmidt, J.2    Aberie, A.G.3    Hezel, R.4
  • 12
    • 0032003448 scopus 로고    scopus 로고
    • 2/Si(100) interfaces by means of x-ray photoelectron spectroscopy under biases and their passivation by cyanide treatment
    • 2/Si(100) interfaces by means of x-ray photoelectron spectroscopy under biases and their passivation by cyanide treatment J. Appl. Phys. 83 1998 2098 2103
    • (1998) J. Appl. Phys. , vol.83 , pp. 2098-2103
    • Kobayashi, H.1    Asano, A.2    Asada, S.3    Yamashita, Y.4    Yoneda, K.5    Todokoro, Y.6
  • 13
    • 33747167944 scopus 로고    scopus 로고
    • Method of observation of low density interface states by means of X-ray photoelectron spectroscopy under bias and passivation by cyanide ions
    • H. Kobayashi, T. Sakurai, Y. Yamashita, T. Kubota, O. Maida, and M. Takahashi Method of observation of low density interface states by means of X-ray photoelectron spectroscopy under bias and passivation by cyanide ions Appl. Surf. Sci. 252 2006 7700 7712
    • (2006) Appl. Surf. Sci. , vol.252 , pp. 7700-7712
    • Kobayashi, H.1    Sakurai, T.2    Yamashita, Y.3    Kubota, T.4    Maida, O.5    Takahashi, M.6
  • 15
    • 30344440145 scopus 로고    scopus 로고
    • Silicon cleaning and defect passivation effects of hydrogen cyanide aqueous solutions
    • M. Takahashi, Y.-L. Liu, N. Fujiwara, H. Iwasa, and H. Kobayashi Silicon cleaning and defect passivation effects of hydrogen cyanide aqueous solutions Solid State Commun. 137 2006 263 267
    • (2006) Solid State Commun. , vol.137 , pp. 263-267
    • Takahashi, M.1    Liu, Y.-L.2    Fujiwara, N.3    Iwasa, H.4    Kobayashi, H.5
  • 16
    • 84893754449 scopus 로고    scopus 로고
    • Metal removal and defect passivation on Si wafers for solar cell use by HCN treatments
    • K. Kimura, M. Takahashi, and H. Kobayashi Metal removal and defect passivation on Si wafers for solar cell use by HCN treatments ECS J. Solid State Sci. Technol 3 2013 Q11 Q15
    • (2013) ECS J. Solid State Sci. Technol , vol.3 , pp. Q11-Q15
    • Kimura, K.1    Takahashi, M.2    Kobayashi, H.3
  • 18
    • 0001413530 scopus 로고
    • Resistivity, mobility, and impurity levels in GaAs, Ge, and Si at 300 °k
    • S.M. Sze, and J.C. Irvin Resistivity, mobility, and impurity levels in GaAs, Ge, and Si at 300 °K Solid State Electron. 11 1968 599 602
    • (1968) Solid State Electron. , vol.11 , pp. 599-602
    • Sze, S.M.1    Irvin, J.C.2
  • 21
    • 37549069357 scopus 로고    scopus 로고
    • Complete removal of copper contaminants on bare silicon surfaces by use of HCN aqueous solutions
    • H. Narita, M. Takahashi, H. Iwasa, and H. Kobayashi Complete removal of copper contaminants on bare silicon surfaces by use of HCN aqueous solutions J. Electrochem. Soc. 155 2008 H103 H107
    • (2008) J. Electrochem. Soc. , vol.155 , pp. H103-H107
    • Narita, H.1    Takahashi, M.2    Iwasa, H.3    Kobayashi, H.4
  • 22
    • 0021461773 scopus 로고
    • Interface states and fixed changes in MNOS structures with APCVD and plasma silicon nitride
    • R. Hezel, K. Blumenstock, and R. Schörner Interface states and fixed changes in MNOS structures with APCVD and plasma silicon nitride J. Electrochem. Soc. 131 1984 1679 1683
    • (1984) J. Electrochem. Soc. , vol.131 , pp. 1679-1683
    • Hezel, R.1    Blumenstock, K.2    Schörner, R.3
  • 26
    • 66549096840 scopus 로고    scopus 로고
    • 2 layer with an extremely low leakage current density formed in high concentration nitric acid
    • 2 layer with an extremely low leakage current density formed in high concentration nitric acid J. Appl. Phys. 105 2009 (103709-1-6)
    • (2009) J. Appl. Phys. , vol.105 , pp. 103709-16
    • Kim, W.-B.1    Matsumoto, T.2    Kobayashi, H.3
  • 27
    • 50249084391 scopus 로고    scopus 로고
    • 2 layer on atomically flat Si(111) surfaces with excellent electrical characteristics formed by nitric acid oxidation method
    • 2 layer on atomically flat Si(111) surfaces with excellent electrical characteristics formed by nitric acid oxidation method Appl. Phys. Lett. 93 2008 (072101-1-3)
    • (2008) Appl. Phys. Lett. , vol.93 , pp. 072101-13
    • Kim, W.-B.1    Asuha, T.2    Matsumoto, H.3    Kobayashi, U.4
  • 29
    • 0346961325 scopus 로고    scopus 로고
    • Nitric acid oxidation of Si toform ultrathin silicon dioxide layers with a low leakage current density
    • H. Kobayashi, Asuha, O. Maida, M. Takahashi, and H. Iwasa Nitric acid oxidation of Si toform ultrathin silicon dioxide layers with a low leakage current density J. Appl. Phys. 94 2003 7328 7335
    • (2003) J. Appl. Phys. , vol.94 , pp. 7328-7335
    • Kobayashi, H.1    Asuha2    Maida, O.3    Takahashi, M.4    Iwasa, H.5
  • 30
    • 79956042601 scopus 로고    scopus 로고
    • Ultrathin silicon dioxide layers with a low leakage current density formed by chemical oxidation of Si
    • Asuha. T. Kobayashi, O. Maida, M. Inoue, M. Takahashi, Y. Todokoro, and H. Kobayashi Ultrathin silicon dioxide layers with a low leakage current density formed by chemical oxidation of Si Appl. Phys. Lett. 81 2002 3410 3412
    • (2002) Appl. Phys. Lett. , vol.81 , pp. 3410-3412
    • Kobayashi Asuha., T.1    Maida, O.2    Inoue, M.3    Takahashi, M.4    Todokoro, Y.5    Kobayashi, H.6
  • 32
    • 79960875452 scopus 로고    scopus 로고
    • Nitric acid oxidation to form a gate oxide layer in sub-micrometer TFT
    • T. Matsumoto, Y. Kubota, S. Imai, and H. Kobayashi Nitric acid oxidation to form a gate oxide layer in sub-micrometer TFT Electrochem. Soc. T. 35 2011 217 227
    • (2011) Electrochem. Soc. T. , vol.35 , pp. 217-227
    • Matsumoto, T.1    Kubota, Y.2    Imai, S.3    Kobayashi, H.4
  • 35
    • 0001188528 scopus 로고
    • An investigation of surface states at a silicon/silicon oxide interface employing metal-oxide-silicon diodes
    • L.M. Terman An investigation of surface states at a silicon/silicon oxide interface employing metal-oxide-silicon diodes Solid State Electron. 5 1962 285 299
    • (1962) Solid State Electron. , vol.5 , pp. 285-299
    • Terman, L.M.1
  • 37
    • 0019607585 scopus 로고
    • Siliconnitride for the improvement of silicon inversion layer solar cells
    • R. Hezel Siliconnitride for the improvement of silicon inversion layer solar cells Solid-State Electron. 24 1981 863 868
    • (1981) Solid-State Electron. , vol.24 , pp. 863-868
    • Hezel, R.1
  • 39
    • 33751520683 scopus 로고
    • Mechanism of carrier transport in highly efficient solar cells having indium tin oxide/Si junctions
    • H. Kobayashi, T. Ishida, Y. Nakato, and H. Tsubomura Mechanism of carrier transport in highly efficient solar cells having indium tin oxide/Si junctions J. Appl. Phys. 69 1991 1736 1743
    • (1991) J. Appl. Phys. , vol.69 , pp. 1736-1743
    • Kobayashi, H.1    Ishida, T.2    Nakato, Y.3    Tsubomura, H.4
  • 41
    • 45549117634 scopus 로고
    • A reassessment of electron escape depths in silicon and thermally grown silicon dioxide thin films
    • M.F. Hochella Jr., and A.H. Carim A reassessment of electron escape depths in silicon and thermally grown silicon dioxide thin films Surf. Sci 197 1988 L260 L268
    • (1988) Surf. Sci , vol.197 , pp. L260-L268
    • Hochella, Jr.M.F.1    Carim, A.H.2
  • 42
    • 0001614074 scopus 로고
    • Electronic structure of hydrogenated and unhydrogenated amorphous SiNx (0≤x≤1.6): A photoemission study
    • R. Kärcher, L. Ley, and R.L. Johnson Electronic structure of hydrogenated and unhydrogenated amorphous SiNx (0≤x≤1.6): a photoemission study Phys. Rev. B 30 1984 1896 1910
    • (1984) Phys. Rev. B , vol.30 , pp. 1896-1910
    • Kärcher, R.1    Ley, L.2    Johnson, R.L.3
  • 44
    • 0035800990 scopus 로고    scopus 로고
    • Surface modification of silicon related materials using a catalytic CVD system for ULSI applications
    • A. Izumi Surface modification of silicon related materials using a catalytic CVD system for ULSI applications Thin Solid Films 395 2001 260 265
    • (2001) Thin Solid Films , vol.395 , pp. 260-265
    • Izumi, A.1
  • 46
    • 0001424378 scopus 로고    scopus 로고
    • Nitridation of silicon oxide layers by nitrogen plasma generated by low energy electron impact
    • H. Kobayashi, T. Mizokuro, Y. Nakato, K. Yoneda, and Y. Todokoro Nitridation of silicon oxide layers by nitrogen plasma generated by low energy electron impact Appl. Phys. Lett. 71 1997 1978 1980
    • (1997) Appl. Phys. Lett. , vol.71 , pp. 1978-1980
    • Kobayashi, H.1    Mizokuro, T.2    Nakato, Y.3    Yoneda, K.4    Todokoro, Y.5


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.