Metal removal and defect passivation performed on Si wafers for solar cell use by HCN treatments

ECS Journal of Solid State Science and Technology

Volumn 3, Issue 2, 2014, Pages

  Kimura, Katsuya ^a   Takahashi, Masao ^a   Kobayashi, Hikaru ^a  

^a OSAKA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 84893754449     PISSN: 21628769     EISSN: 21628777     Source Type: Journal    
DOI: 10.1149/2.007402jss     Document Type: Article

References (26)

1. S. M. Sze, Physics of Semiconductor Devices, 2nd ed., p. 21, Wiley, New York (1981).
2. W. Kern and A. A. Puotinen, R. C. A. Rev., 31, 187 (1970).
3. Y. Mori, K. Uemura, K. Shimanoe, and T. Sakon, J. Electrochem. Soc., 142, 3104 (1995).
4. F. Buchholz, E. Wefringhaus, and G. Schubert, Energy Procedia, 27, 287 (2012).
5. F. Sevenig, L. Breitenstein, A. Oltersdorf, K. Zimmermann, and M. Hermle, Energy Procedia, 8, 288 (2011).
6. M. Takahashi, Y.-L. Liu, N. Fujiwara, H. Iwasa, and H. Kobayashi, Solid State Commun., 137, 263 (2006).
7. N. Fujiwara, Y.-L. Liu, M. Takahashi, and H. Kobayashi, J. Electrochem. Soc., 153, G394 (2006).
8. M. Takahashi, Y.-L. Liu, H. Narita, and H. Kobayashi, Appl. Surf. Sci., 254, 3715 (2008).
9. H. Narita, M. Takahashi, H. Iwasa, and H. Kobayashi, J. Electrochem. Soc., 155, H103 (2008).
10. M. Takahashi, Y. Higashi, S. Ozaki, and H. Kobayashi, J. Electrochem. Soc., 158, H825 (2011).
11. G. C. Lukey, J. S. J. van Deventer, S. T. Huntington, R. L. Chowdhury, and D. C. Shallcross, Hydrometallurgy, 53, 233 (1999).
12. H. Kobayashi, A. Asano, S. Asada, Y. Yamashita, K. Yoneda, and Y. Todokoro, J. Appl. Phys., 83, 2098 (1998).
13. O. Maida, A. Asano, M. Takahashi, H. Iwasa, and H. Kobayashi, Surf. Sci., 542, 244 (2003).
14. H. Kobayashi, M. Takahashi, O. Maida, A. Asano, T. Kubota, J. Ivanco, A. Nakajima, and K. Akimoto, Appl. Surf. Sci., 235, 279 (2004).
15. H. Kobayashi, T. Sakurai, Y. Yamashita, T. Kubota, O. Maida, and M. Takahashi, Appl. Surf. Sci., 252, 7700 (2006).
16. H. Kobayashi, Y.-L. Liu, A. Asano, Y. Yamashita, J. Ivanco, and M. Takahashi, Solar Energy, 80, 645 (2006).
17. Merck Research Laboratories, The Merck Index, twelfth edition, Merck & Co. Ltd., Whitehouse station, NJ, (1996).
18. C. N. Satterfield, Heterogeneous Catalysis in Practice, p. 221, McGraw-Hill, New York (1980).
19. T. S. Horányi, T. Pavelka, and P. TÜttö, Appl. Surf. Sci., 63, 306 (1993).
20. T. Matsumoto, W. Kai, T. Fukushima, M. Takahashi, A. Ishibashi, and H. Kobayashi, ESC J. Solid. State Sci. Technol., 2, Q127 (2013).
21. H. Kobayashi, T. Ishida, Y. Nakato, and H. Tsubomura, J. Appl. Phys., 69, 1736 (1991).
22. CRC Handbook of Chemistry and Physics, 75th ed., p. 951, CRC, Boca Raton, FL (1995).
23. K. Cheng, J. Lee, and J. W. Lyding, Appl. Phys. Lett., 77, 3388 (2000).
24. P. J. Caplan, E. H. Poindexter, B. E. Deal, and R. R. Razouk, J. Appl. Phys., 50, 5847 (1979).
25. J. H. Stathis and E. Cartier, Phys. Rev. Lett., 72, 2745 (1994).
26. D. D. Perin, Ionization Constants of Inorganic Acids and Bases in Aqueous Solutions, second ed., Pergamon, Oxford (1982).