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Journal of Non-Crystalline Solids

Volumn 356, Issue 50-51, 2010, Pages 2880-2883

Optimized surface passivation of n and p type silicon wafers using hydrogenated SiNx layers

(6) Dao, Vinh Ai a Heo, Jongkyu a Kim, Youngkuk a Kim, Kyunghae a Lakshminarayan, N b Yi, Junsin a

a Sungkyunkwan University (South Korea)

b MADRAS CHRISTIAN COLLEGE (India)

Author keywords

Fixed charge; PECVD; Silicon nitride films; Surface passivation

Indexed keywords

FILM COMPOSITION; FIXED CHARGE DENSITY; FIXED CHARGES; HYDROGEN BONDINGS; KEYPOINTS; MINORITY CARRIER LIFETIMES; P-TYPE; P-TYPE SILICON WAFERS; PECVD; POSITIVE CHARGES; SI-H BONDS; SILICON NITRIDE FILMS; SURFACE PASSIVATION;

CARRIER LIFETIME; FOURIER TRANSFORM INFRARED SPECTROSCOPY; FOURIER TRANSFORMS; HYDROGEN; HYDROGEN BONDS; HYDROGENATION; PASSIVATION; REFRACTIVE INDEX; SEMICONDUCTING SILICON COMPOUNDS; SILICON NITRIDE; WAFER BONDING;

SILICON WAFERS;

EID: 78449257249 PISSN: 00223093 EISSN: None Source Type: Journal
DOI: 10.1016/j.jnoncrysol.2010.09.025 Document Type: Article

Times cited : (8)

References (13)

1
- 34547838249
- J. Sritharathikhun, C. Banerjee, M. Otsubo, T. Sugiura, H. Yamamoto, T. Sato, A. Limmanee, A. Yamada, and M. Konagai Jpn. J. Appl. Phys. 46 2007 3296
- (2007) Jpn. J. Appl. Phys. , vol.46 , pp. 3296
- Sritharathikhun, J.¹ Banerjee, C.² Otsubo, M.³ Sugiura, T.⁴ Yamamoto, H.⁵ Sato, T.⁶ Limmanee, A.⁷ Yamada, A.⁸ Konagai, M.⁹

2
- 0030410191
- J. Knobloch, S.W. Glunz, D. Biro, W. Warta, E. Schaffer, and W. Wettling Proc. 25th IEEE Photovoltaic Specialists Conf 1996 405
- (1996) Proc. 25th IEEE Photovoltaic Specialists Conf , pp. 405
- Knobloch, J.¹ Glunz, S.W.² Biro, D.³ Warta, W.⁴ Schaffer, E.⁵ Wettling, W.⁶

3
- 6044223440
- O. Schultz, S.W. Glunz, and G.P. Willeke Prog. Photovlotaics 12 2004 553
- (2004) Prog. Photovlotaics , vol.12 , pp. 553
- Schultz, O.¹ Glunz, S.W.² Willeke, G.P.³

4
- 0022046041
- W.A.P. Claassen, W.G.J.N. Valkenburg, M.F.C. Willemsen, and W.M.V.D. Wijgert J. Electrochem. Soc. 132 1985 893
- (1985) J. Electrochem. Soc. , vol.132 , pp. 893
- Claassen, W.A.P.¹ Valkenburg, W.G.J.N.² Willemsen, M.F.C.³ Wijgert, W.M.V.D.⁴

5
- 78449232558
- Ph.D. Thesis, University of Hannover
- Stefan Dauwe, Ph.D. Thesis, University of Hannover, 2004.
- (2004)
- Dauwe, S.¹

6
- 0030085204
- F. Demichelis, G. Crovini, F. Giorgis, C.F. Pini, and E. Tresso J. Appl. Phys. 79 1996 1730
- (1996) J. Appl. Phys. , vol.79 , pp. 1730
- Demichelis, F.¹ Crovini, G.² Giorgis, F.³ Pini, C.F.⁴ Tresso, E.⁵

7
- 0017959228
- W.A. Lanford, and M.J. Rand J. Appl. Phys. 49 1978 2473
- (1978) J. Appl. Phys. , vol.49 , pp. 2473
- Lanford, W.A.¹ Rand, M.J.²

8
- 0036953415
- S. Dauwe, J. Schmidt, A. Metz, and R. Hezel Proc. 29th IEEE Photovoltaic Specialists Conf 2002 162
- (2002) Proc. 29th IEEE Photovoltaic Specialists Conf , pp. 162
- Dauwe, S.¹ Schmidt, J.² Metz, A.³ Hezel, R.⁴

9
- 0031647567
- S. Garcia, I. Martil, and G. Gonzalez Diaz J. Appl. Phys. 83 1998 600
- (1998) J. Appl. Phys. , vol.83 , pp. 600
- Garcia, S.¹ Martil, I.² Gonzalez Diaz, G.³

10
- 0001374731
- S. Hasegawa, Y. Amano, T. Inokuma, and Y. Kurata J. Appl. Phys. 72 1992 5676
- (1992) J. Appl. Phys. , vol.72 , pp. 5676
- Hasegawa, S.¹ Amano, Y.² Inokuma, T.³ Kurata, Y.⁴

11
- 0012493199
- S. Garcia, D. Bravo, M. Fernandes, I. Martil, and F.L. López Appl. Phys. Lett. 67 1995 3263
- (1995) Appl. Phys. Lett. , vol.67 , pp. 3263
- Garcia, S.¹ Bravo, D.² Fernandes, M.³ Martil, I.⁴ López, F.L.⁵

12
- 84861435358
- H. Mäckel, and R. Lüdemann J. Appl. Phys. 92 2002 2602
- (2002) J. Appl. Phys. , vol.92 , pp. 2602
- MäcKel, H.¹ Lüdemann, R.²

13
- 70350513008
- V.A. Dao, V.D. Nguyen, J. Heo, H. Choi, Y. Kim, N. Lakshminarayan, and J. Yi Vacuum 84 2009 410
- (2009) Vacuum , vol.84 , pp. 410
- Dao, V.A.¹ Nguyen, V.D.² Heo, J.³ Choi, H.⁴ Kim, Y.⁵ Lakshminarayan, N.⁶ Yi, J.⁷

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