SCOPUS 정보 검색 플랫폼

Microelectronic Engineering

Volumn 133, Issue , 2015, Pages 16-22

Study on resist performance of chemically amplified molecular resists based on cyclic oligomers

(3) Yamamoto, Hiroki a Kudo, Hiroto b Kozawa, Takahiro a

a OSAKA UNIVERSITY (Japan)

b KANSAI UNIVERSITY (Japan)

Author keywords

Calixarene derivative; Chemically amplified resist; Extreme ultraviolet; Molecular resist; Noria derivative

Indexed keywords

CYCLODEXTRINS; PHENOLS; PHOTORESISTS;

CALIXARENE DERIVATIVES; CHEMICALLY AMPLIFIED; CHEMICALLY AMPLIFIED RESIST; EXTREME ULTRAVIOLET; EXTREME ULTRAVIOLETS; LITHOGRAPHIC PROCESSING; MOLECULAR RESISTS; RESIST MATERIALS;

DIMERS;

EID: 84918535273 PISSN: 01679317 EISSN: None Source Type: Journal
DOI: 10.1016/j.mee.2014.11.002 Document Type: Article

Times cited : (21)

References (28)

1
- 0020938226
- H. Ito, and C.G. Willson Polym. Eng. Sci. 23 1983 1012
- (1983) Polym. Eng. Sci. , vol.23 , pp. 1012
- Ito, H.¹ Willson, C.G.²

2
- 65549093343
- (accessed online )
- International Technology Roadmap for Semiconductors, http://www.itrs.net, (accessed online 2013).
- (2013) International Technology Roadmap for Semiconductors

3
- 0029770555
- F. Diederich, and C. Thilgen Science 271 1996 317
- (1996) Science , vol.271 , pp. 317
- Diederich, F.¹ Thilgen, C.²

4
- 0000274144
- M. Yoshiiwa, H. Kageyama, Y. Shirota, F. Wakaya, K. Gamo, and M. Takai Appl. Phys. Lett. 69 1996 2605
- (1996) Appl. Phys. Lett. , vol.69 , pp. 2605
- Yoshiiwa, M.¹ Kageyama, H.² Shirota, Y.³ Wakaya, F.⁴ Gamo, K.⁵ Takai, M.⁶

5
- 0001512129
- J. Fujita, Y. Ohnishi, Y. Ochiai, and S. Matsui Appl. Phys. Lett. 68 1996 1297
- (1996) Appl. Phys. Lett. , vol.68 , pp. 1297
- Fujita, J.¹ Ohnishi, Y.² Ochiai, Y.³ Matsui, S.⁴

6
- 33845491919
- H. Kudo, R. Hayashi, K. Mitani, T. Yokozawa, N.C. Kasuga, and T. Nishikubo Angew. Chem. Int. Ed. 45 2006 7948
- (2006) Angew. Chem. Int. Ed. , vol.45 , pp. 7948
- Kudo, H.¹ Hayashi, R.² Mitani, K.³ Yokozawa, T.⁴ Kasuga, N.C.⁵ Nishikubo, T.⁶

7
- 35148825102
- X. André, J.K. Lee, A.D. Silva, C.K. Ober, H.B. Cao, H. Deng, H. Kudo, and T. Nishikubo Proc. SPIE 6519 2007 65194B
- (2007) Proc. SPIE , vol.6519 , pp. 65194B
- André, X.¹ Lee, J.K.² Silva, A.D.³ Ober, C.K.⁴ Cao, H.B.⁵ Deng, H.⁶ Kudo, H.⁷ Nishikubo, T.⁸

8
- 70349659976
- H. Kudo, and T. Nishikubo Polym. J. 41 2009 569
- (2009) Polym. J. , vol.41 , pp. 569
- Kudo, H.¹ Nishikubo, T.²

9
- 47749106514
- H. Kudo, D. Watanabe, T. Nishikubo, K. Maruyama, D. Shimizu, T. Kai, T. Shimokawa, and C.K. Ober J. Mater. Chem. 18 2008 3588
- (2008) J. Mater. Chem. , vol.18 , pp. 3588
- Kudo, H.¹ Watanabe, D.² Nishikubo, T.³ Maruyama, K.⁴ Shimizu, D.⁵ Kai, T.⁶ Shimokawa, T.⁷ Ober, C.K.⁸

10
- 77957110101
- H. Kudo, M. Jinguji, T. Nishikubo, H. Oizumi, and T. Itani J. Photopolym. Sci. Technol. 23 2010 657
- (2010) J. Photopolym. Sci. Technol. , vol.23 , pp. 657
- Kudo, H.¹ Jinguji, M.² Nishikubo, T.³ Oizumi, H.⁴ Itani, T.⁵

11
- 2342628549
- H. Kudo, K. Mitani, S. Koyama, and T. Nishikubo Bull. Chem. Soc. Jpn. 77 2004 819
- (2004) Bull. Chem. Soc. Jpn. , vol.77 , pp. 819
- Kudo, H.¹ Mitani, K.² Koyama, S.³ Nishikubo, T.⁴

12
- 70249113739
- T. Nishikubo, H. Kudo, Y. Suyama, H. Oizumi, and T. Itani J. Photopolym. Sci. Technol. 22 2009 73
- (2009) J. Photopolym. Sci. Technol. , vol.22 , pp. 73
- Nishikubo, T.¹ Kudo, H.² Suyama, Y.³ Oizumi, H.⁴ Itani, T.⁵

13
- 82955227963
- H. Seki, H. Kudo, H. Oizumi, T. Itani, and T. Nishikubo Jpn. J. Appl. Phys. 50 2011 121602
- (2011) Jpn. J. Appl. Phys. , vol.50 , pp. 121602
- Seki, H.¹ Kudo, H.² Oizumi, H.³ Itani, T.⁴ Nishikubo, T.⁵

14
- 84876667737
- N. Niina, H. Kudo, H. Oizumi, T. Itani, and T. Nishikubo Thin Solid Films 534 2013 459
- (2013) Thin Solid Films , vol.534 , pp. 459
- Niina, N.¹ Kudo, H.² Oizumi, H.³ Itani, T.⁴ Nishikubo, T.⁵

15
- 77952536338
- H. Kudo, Y. Suyama, T. Nishikubo, H. Oizumi, and T. Itani J. Mater. Chem. 20 2010 4445
- (2010) J. Mater. Chem. , vol.20 , pp. 4445
- Kudo, H.¹ Suyama, Y.² Nishikubo, T.³ Oizumi, H.⁴ Itani, T.⁵

16
- 33745628743
- S.F. Horne, M.M. Besen, D.K. Smith, P.A. Blackborow, and R. D'Agostino Proc. SPIE 6151 2006 61510P
- (2006) Proc. SPIE , vol.6151 , pp. 61510P
- Horne, S.F.¹ Besen, M.M.² Smith, D.K.³ Blackborow, P.A.⁴ D'Agostino, R.⁵

17
- 77954849759
- N. Nobumitsu, H. Kudo, and T. Nishikubo Chem. Lett. 38 2009 1198
- (2009) Chem. Lett. , vol.38 , pp. 1198
- Nobumitsu, N.¹ Kudo, H.² Nishikubo, T.³

18
- 79953711448
- N. Niina, H. Kudo, K. Maruyama, T. Kai, T. Shimokawa, H. Oizumi, T. Itani, and T. Nishikubo Polym. J. 43 2011 407
- (2011) Polym. J. , vol.43 , pp. 407
- Niina, N.¹ Kudo, H.² Maruyama, K.³ Kai, T.⁴ Shimokawa, T.⁵ Oizumi, H.⁶ Itani, T.⁷ Nishikubo, T.⁸

19
- 84918548491
- JP2008-280269A.
- T. Nishikubo, H. Kudo, Japan Patent (2008) JP2008-280269A.
- (2008) Japan Patent
- Nishikubo, T.¹ Kudo, H.²

20
- 84866029001
- H. Yamada, T. Ikeda, T. Mizuta, and T. Haino Org. Lett. 17 2012 4510
- (2012) Org. Lett. , vol.17 , pp. 4510
- Yamada, H.¹ Ikeda, T.² Mizuta, T.³ Haino, T.⁴

21
- 84864204040
- H. Seki, S. Kuwabara, H. Kudo, and T. Nishikubo Chem. Lett. 41 2012 699
- (2012) Chem. Lett. , vol.41 , pp. 699
- Seki, H.¹ Kuwabara, S.² Kudo, H.³ Nishikubo, T.⁴

22
- 84891583419
- John Wiley & Sons Ltd.
- F. Davis, and S. Higson Macrocycles: Construction, Chemistry and Nanotechnology Application 2011 John Wiley & Sons Ltd.
- (2011) Macrocycles: Construction, Chemistry and Nanotechnology Application
- Davis, F.¹ Higson, S.²

23
- 42149123240
- T. Ogoshi, S. Kanai, S. Fujinami, T. Yamagishi, and Y. Nakamoto J. Am. Chem. Soc. 130 2008 5022
- (2008) J. Am. Chem. Soc. , vol.130 , pp. 5022
- Ogoshi, T.¹ Kanai, S.² Fujinami, S.³ Yamagishi, T.⁴ Nakamoto, Y.⁵

24
- 0000710674
- T. Kozawa, S. Nagahara, Y. Yoshida, and S. Tagawa J. Vac. Sci. Technol. B15 1997 2582
- (1997) J. Vac. Sci. Technol. , vol.15 B , pp. 2582
- Kozawa, T.¹ Nagahara, S.² Yoshida, Y.³ Tagawa, S.⁴

25
- 4444350372
- H. Yamamoto, A. Nakano, K. Okamoto, T. Kozawa, and S. Tagawa Jpn. J. Appl. Phys. 43 2004 3971
- (2004) Jpn. J. Appl. Phys. , vol.43 , pp. 3971
- Yamamoto, H.¹ Nakano, A.² Okamoto, K.³ Kozawa, T.⁴ Tagawa, S.⁵

26
- 29044431922
- H. Yamamoto, T. Kozawa, A. Nakano, K. Okamoto, S. Tagawa, T. Ando, M. Sato, and H. Komano Jpn. J. Appl. Phys. 44 2005 5836
- (2005) Jpn. J. Appl. Phys. , vol.44 , pp. 5836
- Yamamoto, H.¹ Kozawa, T.² Nakano, A.³ Okamoto, K.⁴ Tagawa, S.⁵ Ando, T.⁶ Sato, M.⁷ Komano, H.⁸

27
- 29044442591
- H. Yamamoto, T. Kozawa, A. Nakano, K. Okamoto, S. Tagawa, T. Ando, M. Sato, and H. Komano J. Vac. Sci. Technol. B 23 2005 2728
- (2005) J. Vac. Sci. Technol. B , vol.23 , pp. 2728
- Yamamoto, H.¹ Kozawa, T.² Nakano, A.³ Okamoto, K.⁴ Tagawa, S.⁵ Ando, T.⁶ Sato, M.⁷ Komano, H.⁸

28
- 0001085303
- M. Mella, M. Freccero, T. Soldi, E. Fasani, and A. Albini J. Org. Chem. 61 1996 1413
- (1996) J. Org. Chem. , vol.61 , pp. 1413
- Mella, M.¹ Freccero, M.² Soldi, T.³ Fasani, E.⁴ Albini, A.⁵

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.