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ECS Journal of Solid State Science and Technology

Volumn 3, Issue 4, 2014, Pages P101-P106

Self-Limiting growth and thickness- And temperature- Dependence of optical constants of ALD AlN thin films

(6) Van Bui, H a Nguyen, M D a Wiggers, F B a Aarnink, A A I a De Jong, M P a Kovalgin, A Y a

a UNIVERSITY OF TWENTE (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 84908406876 PISSN: 21628769 EISSN: 21628777 Source Type: Journal
DOI: 10.1149/2.020404jss Document Type: Article

Times cited : (39)

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