A non-destructive method for measuring the mechanical properties of ultrathin films prepared by atomic layer deposition

Applied Physics Letters

Volumn 105, Issue 6, 2014, Pages

  Zhang, Qinglin ^a,b   Xiao, Xingcheng ^a   Cheng, Yang Tse ^b   Verbrugge, Mark W ^a  

^a GENERAL MOTORS CORPORATION   (United States)

^b UNIVERSITY OF KENTUCKY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTICS; DEPOSITION; MECHANICAL PROPERTIES; NONDESTRUCTIVE EXAMINATION; ULTRATHIN FILMS;

COATED DEVICES; CRITICAL PROPERTIES; ELASTIC PROPERTIES; LASER-ACOUSTICS; MEASURED PROPERTIES; MULTIPLE APPLICATIONS; NONDESTRUCTIVE METHODS; ULTRA-THIN;

ATOMIC LAYER DEPOSITION;

EID: 84905990482     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.4892539     Document Type: Article

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