Non-destructive evaluation of diamond and diamond-like carbon films by laser induced surface acoustic waves

Thin Solid Films

Volumn 295, Issue 1-2, 1997, Pages 107-116

  Schneider, Dieter ^a   Schwarz, Thomas ^a   Scheibe, Hans Joachim ^a   Panzner, Michael ^a  

^a FRAUNHOFER INSTITUTE FOR MATERIAL AND BEAM TECHNOLOGY IWS   (Germany)

Author keywords

Diamond; Diamond like carbon; Surface acoustic waves

Indexed keywords

ACOUSTIC WAVES; BANDWIDTH; DENSITY (SPECIFIC GRAVITY); ELASTIC MODULI; FOURIER TRANSFORMS; LASER APPLICATIONS; NONDESTRUCTIVE EXAMINATION; SURFACE WAVES; THICKNESS MEASUREMENT; VELOCITY MEASUREMENT;

DIAMOND LIKE CARBON FILMS; LASER INDUCED SURFACE ACOUSTIC WAVES;

DIAMOND FILMS;

EID: 0031074321     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(96)09163-8     Document Type: Article

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