Effect of catalyst shape and etchant composition on etching direction in metal-assisted chemical etching of silicon to fabricate 3D nanostructures

ACS Nano

Volumn 3, Issue 12, 2009, Pages 4033-4042

  Hildreth, Owen James ^a   Lin, Wei ^a   Wong, Ching Ping ^a  

^a Georgia Institute of Technology

Author keywords

3D nanostructures; Etching; Metal assisted chemical etching; Nanofabrication; Silicon

Indexed keywords

3D NANOSTRUCTURES; EFFECT OF CATALYST; FEATURE SIZES; MASKLESS NANOFABRICATION; METAL-ASSISTED CHEMICAL ETCHING; NANODISCS; NANOFABRICATION; NANOLINES; SILVER NANORODS; VERTICAL CHANNELS; WALL ROUGHNESS;

ASPECT RATIO; CATALYSIS; CATALYSTS; ELECTRON BEAM LITHOGRAPHY; ELECTRON BEAMS; ETCHING; METALS; NANORODS; SILVER;

THREE DIMENSIONAL;

GOLD; NANOMATERIAL; SILICON; SOLVENT;

ARTICLE; CATALYSIS; CHEMISTRY; CONFORMATION; CRYSTALLIZATION; MACROMOLECULE; MATERIALS TESTING; METHODOLOGY; NANOTECHNOLOGY; PARTICLE SIZE; SURFACE PROPERTY; ULTRASTRUCTURE;

CATALYSIS; CRYSTALLIZATION; GOLD; MACROMOLECULAR SUBSTANCES; MATERIALS TESTING; MOLECULAR CONFORMATION; NANOSTRUCTURES; NANOTECHNOLOGY; PARTICLE SIZE; SILICON; SOLVENTS; SURFACE PROPERTIES;

EID: 73849091611     PISSN: 19360851     EISSN: 1936086X     Source Type: Journal    
DOI: 10.1021/nn901174e     Document Type: Article

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