X-ray lithography for 3D microfluidic applications

Microelectronic Engineering

Volumn 73-74, Issue , 2004, Pages 870-875

  Romanato, F ^a   Tormen, M ^a   Businaro, L ^a   Vaccari, L ^a   Stomeo, T ^b   Passaseo, A ^b   Di Fabrizio, E ^a  

^a LABORATORIO TASC   (Italy)

^b NATIONAL NANOTECHNOLOGY LABORATORY   (Italy)

Author keywords

Combined lithographies; Microchannel; Microfluidics; Three dimensional lithography; X ray lithography

Indexed keywords

ELECTRIC NETWORK ANALYSIS; ELECTRODEPOSITION; ELECTRON BEAMS; FABRICATION; LITHOGRAPHY; MICROMACHINING; POLYMETHYL METHACRYLATES; SENSORS; SYNCHROTRON RADIATION;

COMBINED LITHOGRAPHIES; MICROCHANNEL; MICROFLUIDICS;

FLUIDICS;

EID: 2542420027     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(04)00236-9     Document Type: Conference Paper

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