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Thin Solid Films

Volumn 562, Issue , 2014, Pages 70-74

Oxygen effect in radio frequency magnetron sputtered aluminium doped zinc oxide films

(4) Rahmane, Saad a Djouadi, Mohamed Abdou b Aida, Mohamed Salah c Barreau, Nicolas b

a UNIVERSITY OF BISKRA (Algeria)

b UNIVERSITÉ DE NANTES (France)

c Universite Mentouri Constantine (Algeria)

Author keywords

Aluminium doped zinc oxide; Electrical properties; Magnetron sputtering; Oxygen; Structural properties

Indexed keywords

ALUMINUM; CONDUCTIVE FILMS; ELECTRIC PROPERTIES; FILM GROWTH; GLASS; MAGNETRON SPUTTERING; MAGNETRONS; METALLIC FILMS; OXIDE FILMS; OXYGEN; RADIO WAVES; STRUCTURAL PROPERTIES; SUBSTRATES; ZINC OXIDE;

DEPOSITION CHAMBERS; HEXAGONAL STRUCTURES; HIGH TRANSMITTANCE; OPTICAL CHARACTERIZATION; PREFERENTIAL ORIENTATION; PREFERRED ORIENTATIONS; RADIO FREQUENCY MAGNETRON SPUTTERING; TRANSPARENT CONDUCTIVE;

OPTICAL FILMS;

EID: 84901755831 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2014.03.073 Document Type: Article

Times cited : (13)

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