Effects of substrate temperature on properties of ITO-ZnO composition spread films fabricated by combinatorial RF magnetron sputtering

Journal of Solid State Chemistry

Volumn 182, Issue 10, 2009, Pages 2937-2940

  Heo, Gi Seok ^a   Gim, In Gi ^a   Park, Jong Woon ^a   Kim, Kwang Young ^a   Kim, Tae Won ^a  

^a Korea Institute of Industrial Technology   (South Korea)

Author keywords

Combinatorial sputtering; In Zn Sn O; ITO; ITO ZnO; TCOs; ZnO

Indexed keywords

COMBINATORIAL SPUTTERING; IN-ZN-SN-O; ITO; ITO-ZNO; TCOS; ZNO;

ELECTRIC PROPERTIES; MAGNETRON SPUTTERING; MAGNETRONS; METALLIC FILMS; OPTICAL PROPERTIES; SEMICONDUCTING ZINC COMPOUNDS; SUBSTRATES; TIN; ZINC; ZINC OXIDE;

AMORPHOUS FILMS;

EID: 70349554372     PISSN: 00224596     EISSN: 1095726X     Source Type: Journal    
DOI: 10.1016/j.jssc.2009.07.025     Document Type: Article

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