An Electrothermal actuator with two degrees of freedom serving as the arm of a MEMS gripper

IEEE Transactions on Industrial Electronics

Volumn 61, Issue 10, 2014, Pages 5465-5471

  Chen, Dian Sheng ^a   Yeh, Po Fan ^a   Chen, Yu Fan ^a   Tsai, Chun Wei ^a   Yin, Chun Yi ^a   Lai, Ren Jie ^a   Tsai, Jui Che ^a  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

Author keywords

degrees of freedom; electrothermal actuator; in plane; MEMS gripper; out of plane

Indexed keywords

DEGREES OF FREEDOM (MECHANICS); ELECTROMECHANICAL DEVICES; ELECTROSTATIC ACTUATORS; MECHANICS; MEMS; MICROACTUATORS; SILICON NITRIDE;

APPLIED VOLTAGES; ELECTRO-THERMAL ACTUATORS; IN-PLANE; OUT-OF-PLANE; OUT-OF-PLANE MOTION; TIP DISPLACEMENT; TWO DEGREES OF FREEDOM;

GRIPPERS;

EID: 84900558985     PISSN: 02780046     EISSN: None     Source Type: Journal    
DOI: 10.1109/TIE.2013.2293693     Document Type: Article

References (28)

1. K. K. Chan and N. C. Cheung, "A novel two-finger variable-reluctance gripper for high-speed grasping of delicate objects: An implementation case study," IEEE Trans. Ind. Electron., vol. 52, no. 6, pp. 1705-1707, Dec. 2005. (Pubitemid 41830042)
2. E. T. Enikov, L. L. Minkov, and S. Clark, "Microassembly experiments with transparent electrostatic gripper under optical and visionbased control," IEEE Trans. Ind. Electron., vol. 52, no. 4, pp. 1005-1012, Aug. 2005. (Pubitemid 41226853)
3. M. Probst, M. Fluckiger, S. Pane, O. Ergeneman, Z. Nagy, and B. J. Nelson, "Manufacturing of a hybrid acoustic transmitter using an advanced microassembly system," IEEE Trans. Ind. Electron., vol. 56, no. 7, pp. 2657-2666, Jul. 2009.
4. G. Yang, J. A. Gaines, and B. J. Nelson, "Optomechatronic design of microassembly systems for manufacturing hybrid microsystems," IEEE Trans. Ind. Electron., vol. 52, no. 4, pp. 1013-1023, Aug. 2005. (Pubitemid 41226854)
5. R. N. Dean and A. Luque, "Applications of microelectromechanical systems in industrial processes and services," IEEE Trans. Ind. Electron., vol. 56, no. 4, pp. 913-925, Apr. 2009.
6. A. Luque and R. B. Mrad, "Introduction to the special section on microelectromechanical systems in industrial environments," IEEE Trans. Ind. Electron., vol. 59, no. 12, pp. 4853-4854, Dec. 2012.
7. F. J. Delgado, J. M. Quero, J. Garcia, C. L. Tarrida, P. R. Ortega, and S. Bermejo, "Accurate and wide-field-of-view MEMS-based sun sensor for industrial applications," IEEE Trans. Ind. Electron., vol. 59, no. 12, pp. 4871-4880, Dec. 2012.
8. G. Langfelder, S. Dellea, F. Zaraga, D. Cucchi, and M. A. Urquia, "The dependence of fatigue in microelectromechanical systems on the environment and the industrial packaging," IEEE Trans. Ind. Electron., vol. 59, no. 12, pp. 4938-4948, Dec. 2012.
9. G. Langfelder, C. Buffa, A. Frangi, A. Tocchio, E. Lasalandra, and A. Longoni, "Z-axis magnetometers for MEMS inertial measurement units using an industrial process," IEEE Trans. Ind. Electron., vol. 60, no. 9, pp. 3983-3990, Sep. 2013.
10. T. Chen, L. Chen, L. Sun, and X. Li, "Design and fabrication of a fourarm-structure MEMS gripper," IEEE Trans. Ind. Electron., vol. 56, no. 4, pp. 996-1004, Apr. 2009.
11. L. Ren, L. Wang, J. K. Mills, and D. Sun, "Vision-based 2-D automatic micrograsping using coarse-to-fine grasping strategy," IEEE Trans. Ind. Electron., vol. 55, no. 9, pp. 3324-3331, Sep. 2008.
12. J. Lee, D. S. Park, A. K. Nallani, Y. Cui, A. Skoyles, and J.-B. Lee, "Highaspect ratio metallic nano grippers," in Proc. 1st IEEE Int. Conf. Nano/ Micro Eng. Mol. Syst., Zhuhai, China, Jan. 18-21, 2006, pp. 682-686.
13. B. Solano and D. Wood, "Design and testing of a polymeric microgripper for cell manipulation," Microelectron. Eng., vol. 84, no. 5-8, pp. 1219-1222, May 2007. (Pubitemid 46678367)
14. N. Chronis and L. P. Lee, "Electrothermally activated SU-8 microgripper for single cell manipulation in solution," J. Microelectromech. Syst., vol. 14, no. 4, pp. 857-863, Aug. 2005. (Pubitemid 41488605)
15. K. Ivanova, T. Ivanov, A. Badar, B. E. Volland, I. W. Rangelow, D. Andrijasevic, F. Smecz, S. Fischer, M. Spitzbart, W. Brenner, and I. Kostic, "Thermally driven microgripper as a tool for micro assembly," Microelectron. Eng., vol. 83, no. 4-9, pp. 1393-1395, Apr.-Sep. 2006.
16. V. Eichhorn, K. Carlson, K. N. Andersen, S. Fatikow, and P. Boggild, "Nanorobotic manipulation setup for pick-and-place handling and nondestructive characterization of carbon nanotubes," in Proc. IEEE/RSJ Int. Conf. Intell. Robots Syst., San Diego, CA, USA, Oct. 29/Nov. 2, 2007, pp. 291-296.
17. T. Chu Duc, G. K. Lau, J. F. Creemer, and P. M. Sarro, "Electrothermal microgripper with large jaw displacement and integrated force sensors," in Proc. IEEE MEMS, Tucson, AZ, USA, Jan. 13-17, 2008, pp. 519-522.
18. S. T. Todd and H. Xie, "An electrothermomechanical lumped element model of an electrothermal bimorph actuator," J. Microelectromech. Syst., vol. 17, no. 1, pp. 213-225, Feb. 2008. (Pubitemid 351343935)
19. D. Yan, A. Khajepour, and R. Mansour, "Design andmodeling of a MEMS bidirectional vertical thermal actuator," J. Micromech. Microeng., vol. 14, no. 7, pp. 841-850, Jul. 2004.
20. K. M. Liao, C. C. Chueh, and R. Chen, "A novel electro-thermally driven bi-directional microactuator," in Proc. Int. Symp. Micromechatron. Hum. Sci., 2000, pp. 267-274.
21. S. C. Chen and M. L. Culpepper, "Design of a six-axis micro-scale nanopositioner-?HexFlex," Precis. Eng., vol. 30, no. 3, pp. 314-324, Jul. 2006.
22. G. K. Lau, J. F. L. Goosen, F. van Keulen, T. Chu Duc, and P. M. Sarro, "Powerful polymeric thermal microactuator with embedded silicon microstructure," Appl. Phys. Lett., vol. 90, no. 21, pp. 214103-1-214103-3, May 2007.
23. T. Chu Duc, G. K. Lau, and P. M. Sarro, "Polymeric thermal microactuator with embedded silicon skeleton: Part II-fabrication, characterization, and application for 2-DOF microgripper," J. Microelectromech. Syst., vol. 17, no. 4, pp. 823-831, Aug. 2008.
24. J. Wei, T. Chu Duc, G. K. Lau, and P. M. Sarro, "Novel electrothermal bimorph actuator for large out-of-plane displacement and force," in Proc. IEEE MEMS, Tucson, AZ, USA, Jan. 13-17, 2008, pp. 46-49.
25. J. Wei, T. Chu Duc, and P. M. Sarro, "An electro-thermal silicon-polymer micro-gripper for simultaneous in-plane and out-of-plane motions," in Proc. Eurosensors, Dresden, Germany, Sep. 7-10, 2008.
26. D. S. Chen, C. Y. Yin, R. J. Lai, and J. C. Tsai, "A multiple degrees of freedom electrothermal actuator for a versatile MEMS gripper," in Proc. 22nd IEEE Int. Conf.Micro ElectroMech. Syst., Sorrento, Italy, Jan. 2009, pp. 1035-1038.
27. A. Cowen, R. Mahadevan, S. Johnson, and B. Hardy, MetalMUMPs Design Handbook, Rev. 4.0. Durham, NC, USA: MEMSCAP.
28. T. Xie, H. Xie, G. K. Fedder, and Y. Pan, "Endoscopic optical coherence tomography with a modified microelectromechanical systems mirror for detection of bladder cancers," Appl. Opt., vol. 42, no. 31, pp. 6422-6426, Nov. 2003.