A multiple degress of freedom electrothermal actuator for a versatile MEMS gripper

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2009, Pages 1035-1038

  Chen, Dian Sheng ^a   Yin, Chun Yi ^a   Lai, Ren Jie ^a   Tsai, Jui Che ^a  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRO-THERMAL ACTUATORS; IN-PLANE; MULTIPLE DEGREES OF FREEDOM; OUT-OF-PLANE; OUT-OF-PLANE MOTION; STRUCTURAL MATERIALS; TIP DISPLACEMENT;

BUILDING MATERIALS; ELECTROSTATIC ACTUATORS; GRIPPERS; MEMS; MICROACTUATORS; POLYSILICON; SILICON NITRIDE;

MICROELECTROMECHANICAL DEVICES;

EID: 65949113842     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2009.4805563     Document Type: Conference Paper

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