Design and fabrication of a four-arm-structure MEMS gripper

IEEE Transactions on Industrial Electronics

Volumn 56, Issue 4, 2009, Pages 996-1004

  Chen, Tao ^a   Chen, Liguo ^a   Sun, Lining ^a   Li, Xinxin ^b  

^a HARBIN INSTITUTE OF TECHNOLOGY   (China)

^b SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY   (China)

Author keywords

Electrostatic comb drive; Microelectromechanical systems (MEMS); Microgripper; Sidewall piezoresistive sensor

Indexed keywords

ARM STRUCTURES; BULK MICROMACHINING TECHNOLOGIES; ELECTROSTATIC COMB DRIVE; ELECTROSTATICALLY DRIVEN; ETCHING TECHNIQUES; FORCE SENSORS; FORCE-SENSING; GRIPPING FORCES; MICRO ASSEMBLIES; MICRO MANIPULATIONS; MICRO-PARTS; MICROELECTROMECHANICAL SYSTEMS (MEMS); MICROGRIPPER; PIEZO RESISTIVE SENSORS; PIEZORESISTIVE FORCE SENSORS; PIEZORESISTOR; SIDEWALL PIEZORESISTIVE SENSOR; SILICON-ON-INSULATOR WAFERS; SINGLE-CRYSTAL SILICON WAFERS;

ELECTROSTATICS; GRIPPERS; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; MICROMANIPULATORS; SEMICONDUCTING SILICON COMPOUNDS; SENSORS; SILICON WAFERS;

COMPOSITE MICROMECHANICS;

EID: 65549117995     PISSN: 02780046     EISSN: None     Source Type: Journal    
DOI: 10.1109/TIE.2008.2005147     Document Type: Conference Paper

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