Powerful polymeric thermal microactuator with embedded silicon microstructure

Applied Physics Letters

Volumn 90, Issue 21, 2007, Pages

  Lau, G K ^a   Goosen, J F L ^a   Van Keulen, F ^a   Chu Duc, T ^b   Sarro, P M ^b  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

EMBEDDED SYSTEMS; MATHEMATICAL MODELS; MICROACTUATORS; SILICON COMPOUNDS; THERMAL EXPANSION;

POLYMERIC THERMAL MICROACTUATOR; SILICON MICROSTRUCTURE; THERMAL STRAIN;

MICROSTRUCTURE;

EID: 34249709016     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2742599     Document Type: Article

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