Novel electrothermal bimorph actuator for large out-of-plane displacement and force

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2008, Pages 46-49

  Wei, J ^a   Chu Duc, T ^a   Lau, G K ^a   Sarro, P M ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; COMPOSITE MICROMECHANICS; ELECTRIC HEATING; MANGANESE COMPOUNDS; MECHANICAL ENGINEERING; MECHANICS; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; REACTIVE ION ETCHING;

ACTUATION TEMPERATURE; BI-MORPH ACTUATORS; CONSTRAINT EFFECTS; DRIVING VOLTAGES; EXPERIMENTAL VALIDATIONS; INTERNATIONAL CONFERENCES; LOW DRIVING VOLTAGES; MICRO-ELECTRO MECHANICAL SYSTEMS; NOVEL CONCEPT; OUT-OF PLANE; OUT-OF-PLANE ACTUATION; OUT-OF-PLANE DISPLACEMENT; POWER CONSUMPTION; RESISTANCE CHANGES; RESPONSE FREQUENCY; TEMPERATURE VARIATIONS;

FREQUENCY RESPONSE;

EID: 50149091569     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2008.4443589     Document Type: Conference Paper

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