Anatase andrutile TiO2 thin films prepared by reactive DC sputtering at high deposition rates on glass and flexible polyimide substrates

Journal of Materials Science

Volumn 49, Issue 14, 2014, Pages 5035-5042

  Guillen C ^a   Montero, J ^a,b   Herrero, J ^a  

^a CIEMAT   (Spain)

^b UPPSALA UNIVERSITY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 84900401425     PISSN: 00222461     EISSN: 15734803     Source Type: Journal    
DOI: 10.1007/s10853-014-8209-0     Document Type: Article

References (47)

1. 2. Phys Rev B 82:085203
2. 2. J Phys Condens Matter 24:195503
3. Hanaor DAH, Sorrell CC (2011) Review of the anatase to rutile phase transformation. J Mater Sci 46:855-874
4. 2 single crystals. Appl Phys Lett 101:133907
5. Pelaez M, Nolan NT, Pillai SC, Seery MK, Falaras P, Kontos AG, Dunlop PSM, Hamilton JWJ, Byrne JA, ÓShea K, Entezari MH, Dionysiou DD (2012) A review on the visible light active titanium dioxide photocatalysts for environmental applications. Appl Catal B 125:331-349
6. 2 nanocomposites synthesized through reactive direct current magnetron sputter deposition. Thin Solid Films 517:5641-5645
7. Liao J, Luo R, Li YB, Zhang J (2013) Preparation of highly photocatalytically active rutile titania nanorods decorated with anatase nanoparticles produced by a titanyl-oxalato complex solution. Mater Sci Semicond Process 16:2032-2038
8. 2: a comparison of rutile and anatase from GGA + U calculations. J Phys Chem C 114:2321-2328
9. DeSario PA, Chen L, Graham ME, Gray KA (2011) Effect of oxygen deficiency on the photoresponse and reactivity of mixed phase titania thin films. J Vac Sci Technol A 29:031508
10. Chen CH, Shieh J, Hsieh SM, Kuo CL, Liao HY (2012) Architecture, optical absorption, and photocurrent response of oxygen deficient mixed-phase titania nanostructures. Acta Mater 60:6429-6439
11. 2 films in argon-oxygen gas mixtures: theory and experiments. Surf Coat Technol 116-119:933-937
12. 2 based thin films deposited by reactive magnetron sputtering for use at high temperatures. Thin Solid Films 502:188-192
13. 2 thin films and crystal anisotropy of anatase phase deposited by direct current reactive magnetron sputtering. Mater Chem Phys 139:979-987
14. x films. Surf Coat Technol 193:107-111
15. 2 films deposited by arc-free deep oscillation magnetron sputtering. J Phys D 46:084008
16. 2 films deposited by a HIPIMS technique. Vacuum 89:90-95
17. 2 thin films deposited by DC reactive magnetron sputtering. Procedia Eng 32:676-682
18. Ma C, Taya M, Xu C (2008) Flexible electrochromic device based on poly(3,4-(2,2-dimethylpropylenedioxy)thiophene). Electrochim Acta 54:598-605
19. 2 doped Ag thin film on PET plastic for BTEX treatment. J Sustain Energy Environ 2:121-125
20. Weerasinghe HC, Huang F, Cheng YB (2013) Fabrication of flexible dye sensitized solar cells on plastic substrates. Nano Energy 2:174-189
21. Hashmi G, Miettunen K, Peltola T, Halme J, Asghar I, Aitola K, Toivola M, Lund P (2011) Review of materials and manufacturing options for large area flexible dye solar cells. Renew Sustain Energy Rev 15:3717-3732
22. Suchaneck G, Volkonskiy O, Gerlach G, Hubicka Z, Dejneka A, Jastrabik L, Günther S, Schultheiss E (2010) Deposition of PZT on copper-coated polymer films. Ceram Mater 62:456-460
23. Rao GM, Mohan S (1991) Studies on glow-discharge characteristics during dc reactive magnetron sputtering. J Appl Phys 69:6652-6655
24. Kim SH, Lee JH, Hwangbo CK, Lee SM (2002) DC reactive magnetron sputtering with Ar ion-beam assistance for titanium oxide films. Surf Coat Technol 158-159:457-464
25. 2 films. J Appl Phys 71:1421-1427
26. Martin N, Rousselot C, Rondot D, Palmino F, Mercier R (1997) Microstructure modification of amorphous titanium oxide thin films during annealing treatment. Thin Solid Films 300:113-121
27. 2 nanotubes. Energy Environ Sci 4:3408-3413
28. Kumar V, Goyal PK, Gupta R, Kumar S (2011) Tailoring of optical band gap and refractive index of heat treated Kapton-H Polyimide. Adv Appl Sci Res 2:79-85
29. Minkov DA (1989) Calculation of the optical constants of a thin layer upon a transparent substrate from the reflection spectrum. J Phys D 22:1157-1161
30. González-Leal JM, Márquez E, Bernal-Oliva AM, Ruiz-Pérez JJ, Jiménez-Garay R (1998) Derivation of the optical constants of thermally-evaporated uniform films of binary chalcogenide glasses using only their reflection spectra. Thin Solid Films 317:223-227
31. 2). J Appl Phys 93:9537-9541
32. 2 films grown by atomic layer deposition. Thin Solid Films 305:270-273
33. Joint Committee of Powder Diffraction Standards, Powder Diffraction Files: card 00-021-1272 for anatase, card 00-004-0551 for rutile
34. 2. J Phys Chem B 104:3481-3487
35. 2 films by RF magnetron sputtering technique. Chem Mater 21:2777-2788
36. Wiggins MD, Nelson MC, Aita CR (1996) Phase development in sputter deposited titanium dioxide. J Vac Sci Technol A 14:772-776
37. 2 on its optical property and photocatalytic reactivity exemplified by 2-chlorophenol. Appl Catal B 68:1-11
38. 2 thin films deposited by dc magnetron sputtering. J Phys D 40:5232-5238
39. x thin films deposited by electron beam evaporation. Vacuum 81:1023-1028
40. 2 by atomic layer deposition for resistive switching devices. Nanotechnol 24:295202
41. Rodríguez J, Gómez M, Ederth J, Niklasson GA, Granqvist CG (2000) Thickness dependence of the optical properties of sputter deposited Ti oxide films. Thin Solid Films 365:119-125
42. 2 thin films. Int J Nanosci 3:439-442
43. Viseu TMR, Almeida B, Stchakovsky M, Drevillon B, Ferreira MIC, Sousa JB (2001) Optical characterisation of anatase: a comparative study of the bulk crystal and the polycrystalline thin film. Thin Solid Films 401:216-224
44. 2: electron transport and application to dye sensitized injection solar cells. Phys Stat Sol A 182:447-455
45. Martin N, Bally AR, Hones P, Sanjinés R, Lévy F (2000) High rate and process control of reactive sputtering by gas pulsing: the Ti-O system. Thin Solid Films 377-378:550-556
46. 2 thin films. J Non Cryst Solids 354:4944-4947
47. Mardare D, Rusu GI (2010) Electrical conduction mechanism in polycrystalline titanium oxide thin films. J Non Cryst Solids 356:1395-1399