Optical and electrical properties of TiOx thin films deposited by electron beam evaporation

Vacuum

Volumn 81, Issue 9, 2007, Pages 1023-1028

  Yao, Jianke ^a   Shao, Jianda ^a   He, Hongbo ^a   Fan, Zhengxiu ^a  

^a SHANGHAI INSTITUTE OF OPTICS AND FINE MECHANICS   (China)

Author keywords

Electron beam evaporation; Tiox thin film; Titanium monoxide; X ray photoelectron spectroscopy

Indexed keywords

ABSORPTION; ANNEALING; CHARGE TRANSFER; ELECTRIC PROPERTIES; ELECTRON BEAMS; OPTICAL PROPERTIES; TITANIUM OXIDES; X RAY PHOTOELECTRON SPECTROSCOPY;

ELECTRON BEAM EVAPORATION; TITANIUM IONS; TITANIUM MONOXIDE;

THIN FILMS;

EID: 34248209668     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2006.11.002     Document Type: Note

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